Mirror polishing of InP wafer surfaces with NaOCl-citric acid
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Abstract
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques
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References (8)
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7. Weyher · J. Cryst. Growth · 1994 · 141 · 5710.1016/0022-0248(94)90092-2 ↗
8. Akita · J. Cryst. Growth · 1979 · 46 · 78310.1016/0022-0248(79)90227-6 ↗