Photo- and thermionic emission of MWPECVD nanocrystalline diamond films
Source abstract
Abstract
Nanocrystalline diamond (NCD) films with and without a diamond buffer layer (BL) have been grown on p-type silicon substrates by microwave plasma enhanced chemical vapor deposition technique at different values of deposition temperature (652-884°C). The photo- and thermionic electron emission properties of NCD films have been investigated, illustrated and explained by analyzing the surface morphology and the grain shape determined by atomic force microscopy, the chemical-structural properties by Raman spectroscopy and nanocrystallites size by X-ray diffraction. The NCD films with BL grown at the highest deposition temperature have shown the highest photo- and thermionic emission currents.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · High-pressure geophysics and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (30)
Show source-provided references
1. Garguilo · Phys. Rev. B · 2005 · 72 · 165404-110.1103/PhysRevB.72.165404 ↗
2. Yang · Nat. Mater. · 2002 · 1 · 25310.1038/nmat779 ↗
3. Krauss · Diamond Relat. Mater. · 2001 · 10 · 195210.1016/S0925-9635(01)00385-5 ↗
4. Robertson · Diamond Relat. Mater. · 1998 · 7 · 62010.1016/S0925-9635(97)00257-4 ↗
5. Kataoka · Diamond Relat. Mater. · 2010 · 19 · 11010.1016/j.diamond.2009.09.002 ↗
6. Laikhtman · Diamond Relat. Mater. · 1999 · 8 · 72510.1016/S0925-9635(98)00437-3 ↗
7. Cicala · Diamond Relat. Mater. · 2011 · 20 · 119910.1016/j.diamond.2011.06.014 ↗
8. Köch · Diamond Relat. Mater. · 2001 · 10 · 171410.1016/S0925-9635(01)00401-0 ↗
9. Trucchi · Diamond Relat. Mater. · 2006 · 15 · 82710.1016/j.diamond.2005.12.038 ↗
10. Nitti · Nucl. Instrum. Methods Phys. Res. A · 2008 · 595 · 13110.1016/j.nima.2008.07.062 ↗
11. Smith · Diamond Relat. Mater. · 2006 · 15 · 208210.1016/j.diamond.2006.09.011 ↗
12. Robinson · Diamond Relat. Mater. · 2006 · 15 · 160110.1016/j.diamond.2006.01.017 ↗
13. Koeck · Diamond Relat. Mater. · 2004 · 13 · 205210.1016/j.diamond.2004.06.027 ↗
14. Koeck · Diamond Relat. Mater. · 2009 · 18 · 78910.1016/j.diamond.2009.01.024 ↗
15. D.M. Trucchi, E. Cappelli, S. Orlando, D. Sciti, patent n. WO2014033690-A2, Consiglio Nazionale delle Ricerche, Italy, 2013, 43.
16. Smith · Phys. Rev. B · 2007 · 76 · 24532710.1103/PhysRevB.76.245327 ↗
17. Nitti · Nucl. Instrum. Methods Phys. Res. A · 2005 · 553 · 15710.1016/j.nima.2005.08.084 ↗
18. Foord · Diamond Relat. Mater. · 2002 · 11 · 43710.1016/S0925-9635(01)00668-9 ↗
19. Bhattacharyya · Phys. Rev. B · 2004 · 70 · 12541210.1103/PhysRevB.70.125412 ↗
20. Cicala · J. Nanopart. Res. · 2013 · 15 · 1549-110.1007/s11051-013-1549-x ↗
21. Superior hardness and Young's modulus of low temperature nanocrystalline diamond coatings10.1016/j.matchemphys.2014.01.027 ↗
22. Langford · J. Appl. Cryst. · 1978 · 11 · 10210.1107/S0021889878012844 ↗
23. Ferrari · Phys. Rev. B · 2001 · 63 · 12140510.1103/PhysRevB.63.121405 ↗
24. Pfeiffer · Diamond Relat. Mater. · 2003 · 12 · 26810.1016/S0925-9635(02)00336-9 ↗
25. Stacey · J. Appl. Phys. · 2009 · 106 · 103503-1
26. Xiao · Appl. Phys. Lett. · 2008 · 92 · 131908-1
27. Koeck · J. Appl. Phys. · 2012 · 112 · 113707-110.1063/1.4766442 ↗
28. Paxton · Appl. Phys. Lett. · 2012 · 101 · 243509-110.1063/1.4772069 ↗
29. Suzuki · Diamond Relat. Mater. · 2009 · 18 · 127410.1016/j.diamond.2009.05.004 ↗
30. Smith · J. Vac. Sci. Technol. B · 2009 · 27 · 113210.1116/1.3125282 ↗