Performance of a C60+ ion source on a dynamic SIMS instrument
Source abstract
Abstract
Abstract An IonOptika 1 C60+ ion source has been fitted onto a CAMECA1 ims-4f. Stable ion beams of C60+ and C602+ have been obtained with typical currents approaching 20 nA under conditions that allow for several days of source operation. The beam has been able to be focussed into a spot size of ∼3 μm with an anode voltage of 10 keV and scanning ion images have been acquired. We have performed analyses to characterize the performance of C60+ and C602+. Depth profiles of a Cr–Ni multi-layer and polymer films with C60+ have produced excellent results. We have discovered that, under bombardment energies of
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics
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References (6)
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