Laser-induced forward transfer of focussed ion beam pre-machined donors
Source abstract
Abstract
In this paper we report femtosecond laser-induced forward transfer (LIFT) of pre-machined donor films. 1 µm thick zinc oxide (ZnO) films were first machined using the focussed ion beam (FIB) technique up to a depth of 0.8 µm. Debris-free micro-pellets of ZnO with extremely smooth edges and surface uniformity were subsequently printed from these pre-machined donors using LIFT. Printing results of non-machined ZnO donor films and films deposited on top of a polymer dynamic release layer (DRL) are also presented for comparison, indicating the superior quality of transfer achievable and utility of this pre-machining technique.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
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References (19)
Show source-provided references
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