Fabrication of periodical micro-stripe structure of polyimide by laser interference induced forward transfer technique

Abstract Laser induced forward transfer technology has been reported to print various patterns of 2D and 3D structures in microfabrication for its fascinating characteristics such as non-contact and simple fabrication process. However, the efficiency and throughput are the drawback especially for manufacture of periodical polymer micro-stripes. Here, we proposed a laser interference induced forward transfer (LIIFT) technique, which could produce periodical polymer micro-stripes with high efficiency. The experiment results showed that the good micro-stripe of the polyimide (PI) had been transferred from the PI film, in which the thickness of the PI film, the laser fluence and the pulse number were ~1.2 µm, 39 mJ·cm−2 and 50, respectively. In addition, the relationship of the micro-stripes was systematically analyzed with the laser fluence, the pulse number and the thickness of donor film, respectively. Furthermore, the Fourier transform infrared(FT-IR)spectra showed that these characteristic valleys of the micro-stripe were coincident with those of the PI film, indicating that the micro-stripes transferred were not changed for their composition during the laser processing. Finally, the transferring process was discussed to analyze the formation of the transferred micro-stripes.