Optimization of pulsed DC PACVD parameters: Toward reducing wear rate of the DLC films
Source abstract
Abstract
Abstract The effect of pulsed direct current (DC) plasma-assisted chemical vapor deposition (PACVD) parameters such as temperature, duty cycle, hydrogen flow, and argon/CH4 flow ratio on the wear behavior and wear durability of the diamond-like carbon (DLC) films was studied by using response surface methodology (RSM). DLC films were deposited on nitrocarburized AISI 4140 steel. Wear rate and wear durability of the DLC films were examined with the pin-on-disk method. Field emission scanning electron microscopy, Raman spectroscopy, and nanoindentation techniques were used for studying wear mechanisms, chemical structure, and hardness of the DLC films. RSM results show that duty cycle is one of the important parameters that affect the wear rate of the DLC samples. The wear rate of the samples deposited with a duty cycle of >75% decreases with an increase in the argon/CH4 ratio. In contrast, for a duty cycle of
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Lubricants and Their Additives
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (28)
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