journal article·1998-09

Solid-phase crystallization and dopant activation of amorphous silicon films by pulsed rapid thermal annealing

Yongqian Wang, Xianbo Liao, Zhixun Ma, Guozhen Yue, Hongwei Diao, Jie He, Guanglin Kong, Yuwen Zhao, Zhongming Li, Feng Yun

Applied Surface Science· Volume 135· Issue 1-4
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Abstract

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

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References (15)

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