journal article·1989-10

Study of boron nitride gate insulators grown by low temperature plasma enhanced chemical vapor deposition on InP

A. Bath, P.J. van der Put, J. Schoonman, B. Lepley

Applied Surface Science· Volume 39· Issue 1-4
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Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis

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References (10)

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10. Hyder · J. Electrochem. Soc. · 1976 · 123 · 172110.1149/1.2132677 ↗