Ultra-small platinum and gold nanoparticles by arc plasma deposition

Abstract Ultra-small ( V ), discharge condenser capacitance ( C ), and the number of plasma pulse shots ( n ) as controllable parameters. The average size of intrinsic nanoparticles generated by APD process was as small as 0.9 nm and deposited nanoparticles began to have crystal structures from the particle size of about 2 nm. V was the most sensitive parameter to control the size and coverage of generated nanoparticles compared to C and n . Size of APD deposited nanoparticles was also influenced by the nature of evaporating materials and substrates.