The interfacial properties of MgCl2 films grown on a flat SiO2/Si substrate. An XPS and ISS study

Abstract The interaction between MgCl 2 and SiO 2 was investigated by X-ray photoelectron spectroscopy (XPS), ion scattering spectroscopy (ISS) and contact potential difference (CPD) measurements. A thin SiO 2 layer was grown for this purpose on a Si(1 0 0) wafer and MgCl 2 was applied on this support at room temperature by evaporation under UHV conditions. It was found that magnesium chloride is deposited molecularly on the SiO 2 substrate, growing in layers and covering uniformly the oxide surface. The interaction with the substrate is initially very weak and limited to the interfacial layer. Above 623 K, most of the molecular MgCl 2 is re-evaporated and the interfacial interaction becomes stronger, as Mg–Cl bonds in the remaining sub-monolayer chloride break and Cl atoms desorb. This leaves on the surface sub-stoichiometric MgCl x , which interacts with oxygen atoms from the substrate to form a complex surface species. At 973 K all Cl atoms desorb and Mg remains on the surface in the form of an oxide.