Femtosecond transient reflectivity measurements as a probe for process-induced defects in silicon
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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Laser Material Processing Techniques · Advanced Surface Polishing Techniques
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References (7)
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2. Strahnen · 1988 · 69
3. M. Strahnen, G.C. Cho, W. Kütt and H. Kurz, unpublished.
4. Esser · Phys. Rev. B · 1990 · 41 · 287910.1103/PhysRevB.41.2879 ↗
5. Dennis · J. Appl. Phys. · 1978 · 49 · 111910.1063/1.325049 ↗
6. H. Mikkelsen, unpublished.
7. Mader · 1989 · 41