Room temperature growth and properties of ZnO films by pulsed laser deposition

Abstract ZnO thin films were prepared by pulsed laser deposition at room temperature on glass substrates with oxygen pressures of 10–30 Pa. The structural, electrical, and optical properties of ZnO films were studied in detail. ZnO films had an acceptable crystal quality with high c -axis orientation and smooth surface. The resistivity was in the 10 2 Ω cm order for ZnO films, with the electron concentration of 10 16 –10 17 cm −3 . All the films showed a high visible transmittance ∼90% and a high UV absorption about 90–100%. The UV emission ∼390 nm was observed in the photoluminescence spectra. The oxygen pressures in the 10–30 Pa range were suitable for room temperature growth of high-quality ZnO films.