journal article·1997-03

Modifying ALE grown In2O3 films by benzoyl fluoride pulses

Timo Asikainen, Mikko Ritala, Wei-Min Li, Reijo Lappalainen, Markku Leskelä

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OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Ga2O3 and related materials

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References (26)

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