Characterisation of samarium and nitrogen co-doped TiO2 films prepared by chemical spray pyrolysis

Abstract The sol–gel chemical spray pyrolysis method was used to deposit samarium and nitrogen co-doped TiO2 films onto a quartz substrate at a growth temperature of 450 °C using pulsed spray solution feed, followed by annealing at 500 °C for 2 h in air. The obtained films exhibited anatase structure independent of the doping level. According to XRD analysis, the mean crystallite size of the undoped TiO2, TiO2:N(25) and TiO2:N(5):Sm(5) films was 32, 38 and 20 nm, respectively. According to AFM, the undoped TiO2 film consisted of agglomerates with a size of 30–200 nm. N-doping (25 at%) transformed the agglomerates into individually distinctive grains with a size of ca. 30 nm, while Sm doping (5 at%) caused a significant decrease in the average diameter of the agglomerates to ca. 100 nm. The RMS roughness of the undoped TiO2 film was 1.7 nm; doping resulted in the formation of smoother films with RMS roughness of 0.9–1.4 nm. XPS data indicated that the Sm and N dopants were incorporated into the TiO2 crystal lattice and/or adsorbed on the surface of the film. An increasing nitrogen concentration in the spray solution correlates to a systematic suppressing of the photoluminescence intensity of Sm3+.