Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Diamond and Carbon-based Materials Research · Plasma Diagnostics and Applications
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References (8)
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7. Mui · Phys. Rev. B · 1987 · 35 · 808910.1103/PhysRevB.35.8089 ↗
8. Basa · Thin Solid Films · 1990 · 192 · 12110.1016/0040-6090(90)90483-T ↗