Structure and elastic recovery of Cr–C:H films deposited by a reactive magnetron sputtering technique

Cr-containing hydrogenated amorphous carbon (Cr–C:H) films were deposited on silicon substrates using a DC reactive magnetron sputtering with Cr target in an Ar and C2H2 gas mixture. The composition, bond structure, mechanical hardness and elastic recovery of the films were characterized using energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, Raman spectroscopy and nano-indentation. The film tribological behavior was also studied by a ball-on-disc tribo-tester. The results showed that the films deposited at low C2H2 flow rate (<10 sccm) presented a feature of composite Cr–C:H structure, which consisted of hard brittle chromium carbide phases and amorphous hydrocarbon phase, and thus led to the observed low elastic recovery and poor wear resistance of the films. However, the film deposited at high C2H2 flow rate (40 sccm) was found to present a typical feature of polymer-like a-C:H structure containing a large amount of sp 3