Investigation of material properties of thin copper films through finite element modelling of microindentation test
Source abstract
Abstract
Technology processes of thin metal films deposition are entailed with changes in material’s microstructure. As a result, deposited films often are characterized with material properties, which are different from these of the original bulk material. Determination of these material characteristics is of big importance for practice. In the present work the material properties of thin bright copper film with known depth were investigated. The film was deposited electrochemically over substratum composed of metallurgic brass alloy (CuZn36). Based on the results from microindentation test the load–displacement curve is obtained after the indenter is unloaded and the imprint diameter is measured. Consequently the process of indentation was modelled numerically. The numerical simulation is based on the finite element model of the indentation process. As a result of the simulation the load–displacement curve was obtained numerically for a certain set of material parameters. The trial–error approach is applied to find most appropriate set which fit the experimental load–displacement curve. At the end results, which were obtained through numerical simulation give good coincidence with the experiment. Therefore the proposed method can be successfully applied for identification of material parameters of the accepted model. The proposed trial–error approach is appropriate for investigation of thin films with known thickness, deposited on a substrate with known material characteristics.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (28)
Show source-provided references
1. Microstructure and mechanical properties of electroplated cu thin films
2. Safranek · 1974
3. Rashkov · Commun. Dep. Chem. Bulg. Acad. Sci. · 1976 · 9 · 633
4. Effect of the codeposited carbon, sulphur, nitrogen and hydrogen on the microhardness of bright galvanic copper layers10.1080/00202967.1998.11871187 ↗
5. Effect of the structure of the aromatic disulphides on some physico-mechanical properties of electrodeposited copper coatings10.1007/BF01024148 ↗
6. Tensile strength and ductility measurements on electrodeposits
7. M.M. Burgarolas, Continuum analysis of sharp indentation experiments in metallic materials: theory and finite element simulations, Ph.D. Thesis, Universitat Politecnica de Catalunya, Spain, December 2004.
8. Indentation and imprint mapping for the identification of constitutive parameters of thin layers on substrate: perfectly bonded interfaces10.1016/j.msea.2006.10.061 ↗
9. The duality in mechanical property extractions from Vickers and Berkovich instrumented indentation experiments10.1016/j.actamat.2005.03.051 ↗
10. Nanoindentation of polymeric thin films with an interfacial force microscope10.1016/j.jmps.2004.03.005 ↗
11. S. Xiaojun, Y. Sung, L. Anand, Z. Kaiyang, Studies on nano-indentation of polymeric thin films using finite element methods, Tech. report E4-04-10, Singapore-MIT Alliance, Singapore, 2004.
12. Nanoindentation of polymers: an overview10.1002/1521-3900(200103)167:1<15::AID-MASY15>3.0.CO;2-T ↗
13. A novel technique for measuring the mechanical properties of porous materials by nanoindentation10.1557/jmr.2006.0088 ↗
14. Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films10.1016/S0168-583X(97)00034-7 ↗
15. Finite-element modeling of nanoindentation10.1063/1.369178 ↗
16. Investigation on the influence of the boundary conditions by simulation with finite element method of microindentation process
17. Kolarov · 1975
18. A critical examination of the fundamental relations used in the analysis of nanoindentation data10.1557/JMR.1999.0306 ↗
19. Understanding nanoindentation unloading curves10.1557/JMR.2002.0386 ↗
20. Inaccuracies in sneddon’s solution for elastic indentation by a rigid cone and their implications for nanoindentation data analysis
21. D. Stoychev, I. Vitanova, S. Stanchev, et al., BG Patent No. 42287 (3.07.1986).
22. Tushinsky · 2002
23. MSC. Software Corporation, USA, MSC.MARC User’s Guide, 2003.
24. Use of scaling functions to determine mechanical properties of thin coatings from microindentation tests10.1016/S0020-7683(00)00017-2 ↗
25. Numerical modeling of microindentation experiment for determination mechanical characteristics of metals and alloys
26. I. Kisiov, Handbook for Engineers. Part 2. Mechanics, Technics, Sofia, 1965.
27. Gamburg · 1997
28. Hall–petch relationship in pulsed-laser deposited nickel films10.1557/jmr.2004.19.1.218 ↗