journal article·2018-12

Surface chemistry and the corrosion behavior of magnetron sputtered niobium oxide films in sulfuric acid solution

Marina Fuser Pillis, Mara Cristina Lopes de Oliveira, Renato Altobelli Antunes

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Abstract

Abstract In this work, magnetron sputtered Nb2O5 films were obtained at two different deposition times. The surface chemistry of the deposited layers was investigated by X-ray photoelectron spectroscopy (XPS). The corrosion behavior was assessed by electrochemical impedance spectroscopy, potentiodynamic polarization and potentiostatic polarization tests in 0.5 M H2SO4 + 2 ppm HF solution at room temperature. The Nb5+/Nb4+ ratio decreased with the deposition time, leading to a higher surface activity for the film obtained at 30 min. This result was confirmed by its lower impedance values and higher current densities when compared to the 15′-film. Surface chemistry played a major role on the corrosion behavior of the sputtered films and can be tailored by the deposition time.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Semiconductor materials and devices · Metal and Thin Film Mechanics · Ga2O3 and related materials

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