Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films
Source abstract
Abstract
The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zrsingle bondC nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (52)
Show source-provided references
1. Influence of Ag content on mechanical and tribological behavior of DLC coatings10.1016/j.surfcoat.2013.05.048 ↗
2. Carbon-based coatings doped by copper: tribological and mechanical behavior in olive oil lubrication10.1016/j.surfcoat.2011.01.053 ↗
3. How can H content influence the tribological behaviour of W-containing DLC coatings10.1016/j.solidstatesciences.2009.01.001 ↗
4. Doping and alloying effects on DLC coatings
5. Carbides transition metal solid-state chemistry
6. Mechanical properties and microstructure of TiC/amorphous hydrocarbon nanocomposite coatings10.1016/S0040-6090(00)01300-6 ↗
7. Characterization of microstructure and mechanical behavior of sputter deposited Ti-containing amorphous carbon coatings10.1016/S0257-8972(01)01380-9 ↗
8. Advanced TiC/a-C:H nanocomposite coatings deposited by magnetron sputtering10.1016/j.jeurceramsoc.2005.06.023 ↗
9. Nanostructured TiC/a-C coatings for low friction and wear resistant applications10.1016/j.surfcoat.2004.10.106 ↗
10. Nanocrystalline carbide/amorphous carbon composites10.1063/1.365784 ↗
11. Martin · 2009
12. Design of a Ti/TiC/DLC functionally gradient coating based on studies of structural transitions in Ti–C thin films10.1016/S0040-6090(96)09145-6 ↗
13. Nanostructure and properties of TiC/a-C:H composite coatings10.1016/j.actamat.2005.05.045 ↗
14. Microstructural control of TiC/a-C nanocomposite coatings with pulsed magnetron sputtering10.1016/j.actamat.2007.10.025 ↗
15. Sputter deposition of transition-metal carbide films—a critical review from a chemical perspective10.1016/j.tsf.2013.02.019 ↗
16. On the origin of a third spectral component of C1s XPS-spectra for nc-TiC/aC nanocomposite thin films10.1016/j.surfcoat.2007.12.038 ↗
17. Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites10.1103/PhysRevB.80.235108 ↗
18. Influence of the microstructure on the mechanical and tribological behavior of TiC/a-C nanocomposite coatings10.1016/j.tsf.2008.09.091 ↗
19. Supertough wear-resistant coatings with ‘chameleon’ surface adaptation10.1016/S0040-6090(00)00917-2 ↗
20. a-C(:H) and a-C(:H)_Zr coatings deposited on biomedical Ti-based substrates: tribological properties10.1016/j.tsf.2012.12.086 ↗
21. Wagner · 1979
22. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments10.1557/JMR.1992.1564 ↗
23. The tension of metallic films deposited by electrolysis10.1098/rspa.1909.0021 ↗
24. Adsorption of bovine serum albumin on Zr co-sputtered a-C(:H) films: implication on wear behaviour10.1016/j.jmbbm.2014.08.001 ↗
25. Detailed spectroscopic studies of oxygen on metal carbide surfaces10.1016/S0039-6028(98)00456-7 ↗
26. Interaction of oxygen with ZrC(001) and VC(001): photoemission and first-principles studies10.1103/PhysRevB.72.075427 ↗
27. XPS study of the surface composition modification of nc-TiC/C nanocomposite films under in situ argon ion bombardment10.1016/j.tsf.2011.01.200 ↗
28. The effect of increasing V content on the structure, mechanical properties and oxidation resistance of Ti–Si–V–N films deposited by DC reactive magnetron sputtering10.1016/j.apsusc.2013.10.117 ↗
29. Physical and morphological characterization of reactively magnetron sputtered TiN films10.1016/S0040-6090(02)00812-X ↗
30. Line profile analysis
31. Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering10.1016/j.apsusc.2004.05.278 ↗
32. An XPS study of the interaction of oxygen with zirconium10.1016/0039-6028(89)90156-8 ↗
33. Enhanced corrosion resistance of Zr coating on biomedical TiNi alloy prepared by plasma immersion ion implantation and deposition10.1016/j.apsusc.2008.06.116 ↗
34. Ag+ release inhibition from ZrCN–Ag coatings by surface agglomeration mechanism: structural characterization10.1088/0022-3727/46/32/325303 ↗
35. Growth of ZrC thin films by aerosol-assisted MOCVD10.1016/j.jcrysgro.2006.12.071 ↗
36. XPS studies of the thermal behaviour of passivated Zircaloy-4 surfaces10.1002/sia.740111003 ↗
37. Surface chemistry of plasma deposited ZrC hard coatings
38. Magnetron sputtering of Zr–Si–C thin films10.1016/j.tsf.2012.06.044 ↗
39. Characteristics of ZrC/ZrN and ZrC/TiN multilayers grown by pulsed laser deposition10.1016/j.apsusc.2010.11.106 ↗
40. Hantsche · 1992 · pp295
41. Titanium containing amorphous hydrogenated carbon films (a-C:H/Ti): surface analysis and evaluation of cellular reactions using bone marrow cell cultures in vitro10.1016/S0142-9612(99)00135-0 ↗
42. Deposition and characterization of reactive magnetron sputtered zirconium carbide films10.1016/j.surfcoat.2013.06.116 ↗
43. Premathilaka · 2007
44. Nanocomposite TiC/a–C:H hard coatings deposited by reactive PVD10.1016/S0257-8972(00)00888-4 ↗
45. Design of the lattice parameter of embedded nanoparticles10.1016/j.cplett.2010.07.013 ↗
46. X-ray photoelectron spectroscopy study of zirconium-implanted iron and carbon-implanted zirconium10.1016/0257-8972(94)90033-7 ↗
47. Structure and mechanical properties of TiC films deposited using combination of pulsed DC and normal DC magnetron co-sputtering10.1016/j.apsusc.2012.05.064 ↗
48. Residual stress and debonding of DLC films on metallic substrates10.1016/S0925-9635(97)00331-2 ↗
49. Residual stresses in DLC films and adhesion to various substrates
50. Effects of Cr concentrations on the microstructure, hardness, and temperature-dependent tribological properties of Cr-DLC coatings10.1016/j.apsusc.2013.09.036 ↗
51. Tribological behaviour of nanostructured Ti–C:H coatings for biomedical applications10.1016/j.solidstatesciences.2008.10.006 ↗
52. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour10.1016/S0043-1648(00)00488-9 ↗