Brightness measurements of a ZrO/W Schottky electron emitter in a transmission electron microscope
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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Surface and Thin Film Phenomena
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References (14)
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1. L.W. Swanson, G.A. Schwind, Handbook of Charged Particle Optics, Chap. 2: A Review of the ZrO/W Schottky Cathode, CRC Press, New York, 1997.
2. Energy distributions of Zr/O/W Schottky electron emission10.1063/1.364081 ↗
3. Experimental evaluation of the extended-Schottky model for ZrO/W electron emission10.1116/1.590128 ↗
4. P.W. Hawkes, E. Kasper, Principles of Electron Optics, Vol. 2: Applied Geometrical Optics, Chap. 47, Brightness, Academic Press, New York, 1989.10.1016/B978-0-12-333352-0.50018-9 ↗
5. M.T. Otten, Performance of the CM200 FEG, in: Proceedings ICEM 13-Paris, 1994, pp. 235–236.10.1017/S0424820100170256 ↗
6. A stable high-brightness electron gun with Zr/W tip for nanometer lithography: I. Emission properties in Schottky- and thermal field-emission regions10.1143/JJAP.24.766 ↗
7. P. Kruit, G.H. Jansen, Handbook of Charged Particle Optics, Chap. 7, Space Charge and Statistical Coulomb Effects, CRC Press, New York, 1997.
8. Theoretical considerations on electron optical brightness for thermionic, field and T-F emissions10.1016/0304-3991(84)90045-7 ↗
9. General theory of electron emission from metals10.1002/pssb.19660170103 ↗
10. L.W. Swanson, A.E. Bell, Recent advances in field electron microscopy of metals, in: Advances in Electronics and Electron Physics, Vol. 32, Appendix I, Academic Press, New York, pp. 296–304.10.1016/S0065-2539(08)60236-X ↗
11. Addition of different contributions to the charged particle probe size
12. Richtstrahlwertmessungen an einem Strahlerzeugungssystem mit Feldemissionskathode
13. R. Lauer, K.-J. Hanszen, G. Ade, Analyse des interferometrischen Verfahrens zur Messung des Richtstrahlwerts von Elektronenkanonen, Number APh-24 in PTB-Bericht, Physikalisch-Technischen Bundesanstalt, 1985.
14. Possibilities of brightness measurements in non-rotationally symmetrical electron beams by measuring the current density and determining the decrease of contrast in electron interferograms or micrographs