Epitaxial growth of LiNbO3 thin films using pulsed laser deposition
Source abstract
Abstract
Abstract An epitaxial lithium niobate (LiNbO3) thin film was successfully fabricated on an α-Al2O3(0 0 0 1) substrate using a pulsed laser deposition method and the effect of laser fluence on film quality was investigated. The Li concentration in a deposited film was largely influenced by oxygen radicals, which were produced not only by the interaction between the incident excimer laser and the oxygen but also by an rf-radical source. The re-evaporation of Li atoms in the film was suppressed by the oxidation of Li atoms.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Photorefractive and Nonlinear Optics · Semiconductor materials and devices · Photonic and Optical Devices
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References (12)
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