An investigation of sidewall adhesion in MEMS
Source abstract
Abstract
Adhesion or stiction is a key problem in surface micromachining technology, affecting the reliability of most MEMS. To date, the quantitative analysis of the phenomenon has been limited to in-plane adhesion. Since many micromechanisms involve contacts between sidewalls, we have designed a microinstrument to measure sidewall adhesion. Here, we describe the design, modeling, results and problems encountered with this first generation of sidewall adhesion devices.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Metal and Thin Film Mechanics · Force Microscopy Techniques and Applications
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References (13)
Show source-provided references
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