Direct writing of conformal mesoscopic electronic devices by MAPLE DW

Abstract We demonstrate a novel pulsed UV laser direct writing technique called MAPLE DW for the fabrication of conformal electronic devices. MAPLE DW (matrix assisted pulsed laser evaporation direct write) is a soft laser forward transfer technique that takes place in air and at room temperature. Specific experimental results for the deposition of Ag metal and BaTiO3 composite dielectrics with electrical quality comparable to conventional thick film deposition techniques will be given as well as a discussion of the relevant issues for further electronic device improvement. The mechanism of the MAPLE DW process that makes it applicable to a broad class of electronic materials and even biomaterials is also described.