Combination of excimer laser micromachining and replication processes suited for large scale production
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Laser Material Processing Techniques · Surface Roughness and Optical Measurements · Semiconductor Lasers and Optical Devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (13)
Show source-provided references
1. Srinivasan · J. Polym. Sci. Polym. Chem. Ed. · 1984 · 22 · 260110.1002/pol.1984.170221026 ↗
2. Küper · Appl. Phys. B · 1987 · 44 · 19910.1007/BF00692122 ↗
3. Braun · Appl. Surf. Sci. · 1989 · 43 · 35210.1016/0169-4332(89)90238-9 ↗
4. Sutcliffe · J. Appl. Phys. · 1986 · 60 · 331510.1063/1.337698 ↗
5. Rumsby · 1991 · 1598 · 36
6. Gower · 1992 · 1835 · 133
7. Phillips · 1993 · 285 · 169
8. Ehrfeld · Nucl. Instrum. Methods A · 1991 · 303 · 52310.1016/0168-9002(91)90289-3 ↗
9. W. Ehrfeld and H. Lehr, Radiat. Phys. Chem., in press.
10. Kitai · 1990 · 37 · 257
11. Lankard · Appl. Phys. A · 1992 · 54 · 35510.1007/BF00324201 ↗
12. Kahlert · 1992 · 1835 · 110
13. Küper · 1992 · 236 · 59