journal article·2025-04

Cluster ion bombardment and depth profiling of parylene C using Ar vs O2 gas cluster ion beams

Christine M. Mahoney, Kaveh Adib, Ruchi Yongsunthon

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OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Diamond and Carbon-based Materials Research

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References (21)

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1. Parylene coatings in medical devices and implants: A review10.13189/ujbe.2015.030201 ↗
2. Chemical surface modification of parylene C for enchanced protein immobiliation and cell proliferation10.1016/j.actbio.2011.06.003 ↗
3. Recent progress on parylene C polymer for biomedical applications: A review
4. A production parylene coating process for hybrid microcircuits10.1109/TPHP.1977.1135214 ↗
5. Thin-film encapsulation of organic light-emitting devices10.1063/1.1929867 ↗
6. The packaging of implantable integrated sensors10.1109/TBME.1986.325807 ↗
7. Conformal coating using parylene polymers
8. Parylene C as a versatile dielectric material for organic field-effect transistors10.3762/bjnano.8.155 ↗
9. General Synthetic Method for the Preparation of Linear Poly-p-xylylenes
10. Gas cluster ion beams for secondary ion mass spectrometry10.1146/annurev-anchem-061516-045249 ↗
11. Mahoney · 2013
12. Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams10.1002/rcm.4046 ↗
13. 3D ToF-SIMS imaging of polymer multilayer films using argon cluster sputter depth profiling10.1021/am507663v ↗
14. VAMAS interlaboratory study on organic depth profiling 1: Preliminary report10.1002/sia.3268 ↗
15. VAMAS interlaboratory study on organic depth profiling10.1002/sia.3705 ↗
16. Busby · 2018 · 27
17. Surface and interface properties of thin pentacene and parylene layers10.2478/s11534-009-0018-8 ↗
18. D.M. Kang S. Matsuki Y.-C. Tai Study of the Hybrid Parylene/PDMS Material 2015 Estoril, Portugal 397-400.10.1109/MEMSYS.2015.7050973 ↗
19. Sensitivity enhancement using chemically reactive gas cluster ion beams in secondary ion mass spectrometry (SIMS)10.1002/sia.7054 ↗
20. Analysis of polymer surfaces by SIMS. 16. Investigation of surface crosslinking in polymer gels of 2-hydroxyethyl methacrylate10.1021/ma00070a016 ↗
21. Cluster secondary ion mass spectrometry of polymers and related materials10.1002/mas.20233 ↗