Tailoring ZnO/Si MSM photodetector performance from ultraviolet to near-infrared through post-annealing optimization
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OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Ga2O3 and related materials
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References (56)
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1. Broadband-detection and low-operating-voltage photodetectors based on metal oxide/perovskite quantum dot heterojunctions10.1021/acs.jpclett.5c00734 ↗
2. Highly sensitive broadband polarized photodetector based on the As0.6P0.4/WSe2 heterostructure toward imaging and optical communication application10.1021/acsami.3c19422 ↗
3. Graphene photodetectors with ultra-broadband and high responsivity at room temperature10.1038/nnano.2014.31 ↗
4. Optical properties of ZnO nanostructures10.1002/smll.200600134 ↗
5. A comprehensive review of ZnO materials and devices10.1063/1.1992666 ↗
6. C. Jagadish, S.J. Pearton, Eds., Zinc oxide bulk, Thin Films and Nanostructures, Elsevier: New York, 2006.
7. Zinc oxide ultraviolet photodetectors: rapid progress from conventional to self-powered photodetectors10.1039/C9NA00130A ↗
8. Ultraviolet-visible-near infrared broadband photodetector based on electronspun disorder ZnO nanowires/Ge quantum dots hybrid structure10.3390/cryst12020172 ↗
9. Nanoplasmonic enhanced ZnO/Si heterojunction metal-semiconductor-metal photodetectors10.1007/s11664-013-2526-y ↗
10. Broadband photodetector based on Co3O4/ZnO/Si double heterojunctions: a morphological and optoelectronic study10.1016/j.optmat.2024.114974 ↗
11. The influence of magnetron sputtering process temperature on ZnO thin-film properties10.3390/coatings11121507 ↗
12. Enhanced sensitivity of low-cost fabricated fluorine doped ZnO metal semiconductor metal photodetector10.1016/j.optmat.2021.111771 ↗
13. Using MgO capping layer to enhance the performance of ZnO based metal-semiconductor-metal photodetectors10.1016/j.sna.2022.113545 ↗
14. Role of kinetic energy of sputtered particles in thin film formation10.1016/S0039-6028(97)00313-0 ↗
15. Effect of sputtering power on structure and properties of ZTO films10.1016/j.jallcom.2021.160622 ↗
16. Impact of oxygen deficiency and shallow hole-traps on high-responsivity ZnO-based UV photodetectors10.1016/j.sna.2024.115160 ↗
17. Effects of continuous annealing on the performance of ZnO based metal-semiconductor-metal ultraviolet photodetectors10.1016/j.mseb.2014.01.008 ↗
18. MgZnO MSM UV photodetector with different annealing temperatures by RF magnetron sputtering10.1149/2162-8777/ab9c76 ↗
19. Optimization of thermal annealing of zinc oxide films for enhancing performances of near-infrared organic photodetectors10.1016/j.dyepig.2022.110907 ↗
20. Optimization of post-annealing temperature of RF magnetron-sputtered ZnO thin films for enhancing performances of UV photodetectors10.1149/1945-7111/ad7983 ↗
21. Morphology, electrical and optical properties of magnetron sputtered porous ZnO thin films on Si(100) and Si(111) substrates10.1016/j.ceramint.2019.11.147 ↗
22. The influence of annealing temperature on the microstructure and electrical properties of sputtered ZnO thin films10.3390/inorganics12090236 ↗
23. The effect of vacuum annealing on the structures and optical and electric properties of the sputtered ZnO films
24. Comparative study of ZnO thin films grown on quartz glass and sapphire (001) substrates by means of magnetron sputtering and high-temperature annealing10.3390/app9214509 ↗
25. Silver-enriched ZnO:Ag thin films deposited by magnetron co-sputtering: post annealing effects on structural and physical properties10.1016/j.mseb.2021.115558 ↗
26. The effect of hydrogen annealing on the electronic conductivity of Al-doped zinc oxide thin films10.3390/ma18051032 ↗
27. Confocal sputtered ZnO thin films: the role of RF sputtering power and annealing in enhancing structural and optoelectronic properties10.1149/2162-8777/adcc55 ↗
28. R. J. Younkin, Surface studies and microstructure fabrication using femtosecond laser pulses, Ph. D. dissertation, Dept. Division Eng. Appl. Sci., Harvard Univ., Cambridge, MA, USA, 2001.
29. Enhanced broadband photodetection in ZnO/black silicon heterojunctions from ultraviolet to short-wave infrared10.1016/j.jallcom.2025.182100 ↗
30. The Scherrer formula for X-Ray particle size determination10.1103/PhysRev.56.978 ↗
31. Two-dimensional chemical state plots: a standardized data set for use in identifying chemical states by X-ray photoelectron spectroscopy10.1021/ac50040a005 ↗
32. Synthesis of nanowires, nanorods and nanoparticles of ZnO through modulating the ratio of water to methanol by using a mild and simple solution method10.1016/j.matchemphys.2004.09.006 ↗
33. Micro-Raman and XPS studies of pure ZnO ceramics10.1016/j.physb.2010.03.020 ↗
34. Tailoring the green, yellow and red defect emission bands in ZnO nanowires via the growth parameters10.1016/j.jlumin.2019.02.017 ↗
35. Luminescence properties of calcium doped zinc oxide nanoparticles10.1016/j.jlumin.2017.02.029 ↗
36. Photoluminescence and cathodoluminescence studies of stoichiometric and oxygen-deficient ZnO films10.1063/1.1361288 ↗
37. Photoluminescent and structural properties of precipitated ZnO fine particles10.1143/JJAP.42.481 ↗
38. Optical properties and electronic structure of amorphous Ge and Si10.1016/0025-5408(68)90023-8 ↗
39. Band-gap narrowing in heavily defect-doped ZnO10.1103/PhysRevB.25.7836 ↗
40. Ultraviolet photodetectors based on wide bandgap semiconductor: a review10.1007/s00339-024-07501-y ↗
41. WO3-x/Si n-n homotype heterojunction with high performance photodetection characteristics10.1016/j.scriptamat.2020.08.012 ↗
42. Self-powered broadband α-MoO3/Si photodetector based on photo-induced thermoelectric effect10.1016/j.ceramint.2022.05.166 ↗
43. Laser-microstructured ZnO/p-Si photodetector with enhanced and broadband responsivity across the ultraviolet-visible-near-infrared range10.1021/acsaelm.0c00492 ↗
44. Wavelength-selective, high-speed, self-powered isotype heterojunction n+-ZnO/n-Si photodetector with engineered and tunable spectral response10.1002/admt.202401740 ↗
45. Ultrafast and ultrabroadband UV-vis-NIR photosensitivity under reverse and self-bias conditions by n+-ZnO/n-Si isotype heterojunction with >1 kHz bandwidth10.1021/acsaelm.2c01668 ↗
46. Eco-friendly ultrafast self-powered p-Si/n-ZnO photodetector enhanced by photovoltaic-pyroelectric coupling effect10.1016/j.ceramint.2022.02.162 ↗
47. Broadband spectral photodetector based on all-amorphous ZnO/Si heterostructure incorporating Ag intermediate thin-films10.1016/j.optmat.2022.112578 ↗
48. High-performance broadband Si/ZnO heterojunction photodetector based on pyro-phototronic effect10.1016/j.optmat.2023.114752 ↗
49. Broadband wavelength-selective isotype heterojunction n+-ZnO/n-Si photodetector with variable polarity10.1016/j.jallcom.2022.163836 ↗
50. A self-powered, flexible ultra-thin Si/ZnO nanowire photodetector as full-spectrum optical sensor and pyroelectric nanogenerator10.3762/bjnano.11.145 ↗
51. Broadband (ultraviolet to near-infrared) photodetector fabricated in n-ZnO/p-Si nanowires core-shell arrays with ligand-free plasmonic Au nanoparticles10.1021/acs.jpcc.0c06080 ↗
52. Broadband omnidirectional light detection in flexible and hierarchical ZnO/Si heterojunction photodiodes10.1007/s12274-016-1263-y ↗
53. Magnetic resonance studies of intrinsic defects in ZnO: oxygen vacancy10.1007/s00723-010-0140-1 ↗
54. EPR and photoluminescence spectroscopy studies on the defect structure of ZnO nanocrystals10.1103/PhysRevB.86.014113 ↗
55. Blue luminescence of ZnO nanoparticles based on non-equilibrium processes: defect origins and emission controls10.1002/adfm.200901884 ↗
56. Review of photodetectors characterization methods