journal article·2025-04

Efficient Cu/SiO2 hybrid bonding through alkaline surface modification for 3D IC integration

Yu-An Chen, Jia-Juen Ong, Dinh-Phuc Tran, Wei-Lan Chiu, Hsiang-Hung Chang, Wei-You Hsu, Chih Chen

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OpenAlex topics: 3D IC and TSV technologies · Additive Manufacturing and 3D Printing Technologies · Electronic Packaging and Soldering Technologies

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