Complexing effect of potassium citrate on Ti barrier layer of local Co interconnects during its chemical mechanical polishing process
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Lubricants and Their Additives · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (42)
Show source-provided references
1. Study on effect of complexing agents on Co oxidation/dissolution for chemical-mechanical polishing and cleaning process10.1016/j.mee.2020.111308 ↗
2. Origins of wear-induced tungsten corrosion defects in semiconductor manufacturing during tungsten chemical mechanical polishing10.1016/j.apsusc.2022.153767 ↗
3. Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application10.1016/j.jcis.2023.04.012 ↗
4. A fundamental approach to electrochemical analyses on chemically modified thin films for barrier CMP optimization
5. The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer10.1016/S0254-0584(03)00312-2 ↗
6. Experimental and computational studies on octyl hydroxamic acid as an environmentally friendly inhibitor of cobalt chemical mechanical polishing10.1021/acsami.2c02837 ↗
7. Dual functionality of DTPMP and OHA: enhancement in removal rates and excellent surface quality of cobalt CMP10.1016/j.electacta.2024.145591 ↗
8. Sub-100 nm2 cobalt interconnects10.1109/LED.2018.2821923 ↗
9. Controlled cobalt recess for advanced interconnect metallization10.1016/j.mee.2019.111131 ↗
10. Electron mean free path in elemental metals10.1063/1.4942216 ↗
11. Material removal mechanism of copper chemical mechanical polishing in a periodate-based slurry10.1016/j.apsusc.2015.02.076 ↗
12. Surface characteristics of ruthenium in periodate-based slurry during chemical mechanical polishing10.1016/j.apsusc.2015.05.150 ↗
13. A study on the correlation between electrochemical corrosion and chemical mechanical polishing performance of W and Ti film10.1016/j.mee.2006.09.003 ↗
14. Effects of oxidant additives for exact selectivity control of W- and Ti-CMP process10.1016/j.mee.2004.10.003 ↗
15. Synergetic effect of H2O2 and glycine on cobalt CMP in weakly alkaline slurry10.1016/j.mee.2014.02.002 ↗
16. Effect of potassium tartrate on removal rate selectivity of Co/TiN/TEOS for cobalt “Buff step” chemical mechanical planarization
17. High-efficiency chemical mechanical polishing of Ti-6Al-4V alloy via the synergistic action of H2O2 and K+ under alkaline conditions
18. Synergistic effects of PBTCA and ABO on the chemical mechanical polishing of titanium barrier layers in TSV application10.1016/j.apsusc.2025.162438 ↗
19. Effects of pH and H2O2 on the chemical mechanical polishing of titanium alloys10.1016/j.jmatprotec.2021.117204 ↗
20. Sub-nano to nanometer wear and tribocorrosion of titanium oxide-metal surfaces by in situ atomic force microscopy10.1016/j.actbio.2021.03.049 ↗
21. Insights into charge transfer dynamics of Li batteries through temperature-dependent electrochemical impedance spectroscopy (EIS) utilizing symmetric cell configuration10.1016/j.electacta.2024.144080 ↗
22. In situ and operando AFM and EIS studies of anodization of Al 6060: influence of intermetallic particles10.1149/2.0061610jes ↗
23. Electrochemical and AFM studies of mussel adhesive protein (Mefp-1) as corrosion inhibitor for carbon steel10.1016/j.electacta.2010.10.033 ↗
24. Preparation of phytic acid conversion coating and corrosion protection performances for steel in chlorinated simulated concrete pore solution10.1016/j.corsci.2018.05.018 ↗
25. Micro-galvanic corrosion of Cu/Ru couple in potassium periodate (KIO 4) solution10.1016/j.corsci.2018.03.045 ↗
26. Titanium corrosion in alkaline hydrogen peroxide10.5006/1.3280584 ↗
27. Development of organo-dispersible graphene oxide via pseudo-surface modification for thermally conductive green polymer composites10.1021/acsomega.8b02478 ↗
28. Adsorption of gold cyanide on quartz10.1016/j.colsurfa.2020.124514 ↗
29. Experimental and density functional theory study of benzohydroxamic acid as a corrosion inhibitor in chemical mechanical polishing of Co interconnects10.1016/j.colsurfa.2022.130848 ↗
30. Analysis of adsorption properties of typical partial discharge gases on Ni-SWCNTs using density functional theory10.1016/j.apsusc.2016.04.048 ↗
31. DFT studies of pyridine corrosion inhibitors in electrical double layer: solvent, substrate, and electric field effects10.1016/j.chemphys.2003.12.019 ↗
32. Theoretical study on the molecular and electronic properties of some substances used for diabetes mellitus treatment10.1007/s00894-009-0627-6 ↗
33. Effects of natural antioxidants on the oxidative stability of Eucommia ulmoides seed oil: Experimental and molecular simulation investigations10.1016/j.foodchem.2022.132640 ↗
34. Two amino acid derivatives as high efficient green inhibitors for the corrosion of carbon steel in CO2-saturated formation water10.1016/j.corsci.2021.109596 ↗
35. Understanding the adsorption mechanism of benzotriazole and its derivatives as effective corrosion inhibitors for cobalt in chemical mechanical polishing10.1016/j.apsusc.2024.161684 ↗
36. Quantum and dynamic investigations of Complex iron- alkaloid-extract Cytisine derivatives of Retama monosperma (L.) Boiss. Seeds as eco-friendly inhibitors for Mild steel corrosion in 1M HCl10.1016/j.molstruc.2021.130921 ↗
37. Fabrication of environmentally friendly Losartan potassium film for corrosion inhibition of mild steel in HCl medium10.1016/j.cej.2020.126863 ↗
38. Chemical mechanical planarization of barrier layers by using a weakly alkaline slurry10.1016/j.mee.2013.04.001 ↗
39. Fundamental photoelectrocatalytic and electrophoretic mobility studies of TIO2 and V-doped TIO2 thin-film electrode materials10.1021/jp026317y ↗
40. An overview of surface forces and the DLVO theory10.1007/s40828-023-00182-9 ↗
41. Improvement of barrier CMP performance with alkaline slurry: role of ionic strength
42. Effect of ionic strength on ruthenium CMP in H2O2-based slurries10.1016/j.apsusc.2014.08.063 ↗