Pulsed laser deposition of the NiTiCu thin film alloy

Abstract Ni–Ti–Cu alloy present different properties: shape memory effect, super-elasticity and biocompatibility which allow it to be used in different fields: from biomedical to micro electro mechanical systems. It is complex to obtain these properties in thin films of Ni–Ti–Cu alloy deposited on Si substrates. In this work preliminary results, in situ X-ray fluorescence data, ex situ X-ray diffraction data of Ni–Ti–Cu thin film will be reported. These measurements will allow to control the correct growth of the thin film alloy produced by laser deposition.