Opto-electrical properties of amorphous silicon carbide thin films adjustably prepared by magnetron sputtering at room temperature

1. A silicon carbide-based highly transparent passivating contact for crystalline silicon solar cells approaching efficiencies of 24%10.1038/s41560-021-00806-9 ↗

2. Amorphous silicon PEC-PV hybrid structure for photo-electrochemical water splitting

3. S.A. Boussaa, K. Benfadel, A.T. Khodja, M. Ayachi, R. Boulil, K. Bekhedda, L. Talbi, A. Boukezzata, Y. Ouadah, D. Allam, L. Maifi, A. Keffous, A. Chetoui, C. Torki, F. Boudeffar, S. Achacha, A. Manseri, N.Z. Boutarek, S. Kaci, Elaboration and Characterization of Amorphous Silicon Carbide Thin Films (a-SiC) by Sputerring Magnetron Technique for Photoelectrochemical CO2 Conversion, Silicon. (2022) https://doi.org/10.1007/s12633-022-02075-x.10.1007/s12633-022-02075-x ↗

4. Boron-doped silicon carbide (SiC) thin film on silicon (Si): a novel electrode material for supercapacitor application10.1007/s10854-020-04346-y ↗

5. Ohmic contacts to single-crystalline 3C-SiC films for extreme-environment MEMS applications10.1016/j.mejo.2008.06.052 ↗

6. SiC- and Ag-SiC-Doped Hydroxyapatite Coatings Grown Using Magnetron Sputtering on Ti Alloy for Biomedical Application10.3390/coatings12020195 ↗

7. Effect of pyrocarbon texture on the mechanical and oxidative erosion property of SiC coating for protecting carbon/carbon composites10.1016/j.ceramint.2021.08.162 ↗

8. Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition10.1007/s11664-019-07097-7 ↗

9. Effect of substrate temperature on structural and linear and nonlinear optical properties of nanostructured PLD a-SiC thin films10.1016/j.materresbull.2016.07.026 ↗

10. CVD diamond-SiC composite films: Structure and electrical properties10.1016/j.diamond.2022.108975 ↗

11. High-temperature oxidation behavior of CVD-SiC ceramic coating in wet oxygen and structural evolution of oxidation product: Experiment and first-principle calculations10.1016/j.apsusc.2021.149808 ↗

12. Electrical and optical properties of amorphous silicon carbide thin films prepared by e-beam evaporation at room temperature10.1016/j.jnoncrysol.2021.121233 ↗

13. Characterization of the evaporation behavior of a β-SiC target during electron beam-physical vapor deposition10.1016/j.jallcom.2009.10.218 ↗

14. Influence of remaining C on hardness and emissivity of SiC/SiO2 nanocomposite coating10.1016/j.apsusc.2007.02.051 ↗

15. Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition10.1016/j.actamat.2008.10.031 ↗

16. Structural properties and preparation of Si-rich Si1−xCx thin films by radio-frequency magnetron sputtering10.1016/j.apsusc.2015.12.097 ↗

17. Post-annealing effects on RF sputtered all-amorphous ZnO/SiC heterostructure for solar-blind highly-detective and ultralow dark-noise UV photodetector10.1016/j.jnoncrysol.2021.121168 ↗

18. Magnetron sputtering – Milestones of 30 years10.1016/j.vacuum.2009.12.014 ↗

19. Preparation and characterization of boron doped a-SiC: H films by dc-magnetron sputtering technique10.1016/0042-207X(91)90039-L ↗

20. Structural and optical properties of a-Si1−xCx: H films synthesized by dc magnetron sputtering technique10.1016/j.apsusc.2010.02.054 ↗

21. The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering10.1016/j.surfcoat.2018.12.115 ↗

22. Hydrogen Sorption Kinetics of SiC-Coated Zr-1Nb Alloy10.3390/coatings9010031 ↗

23. Effect of sputtering power on the structure and optical band gap of SiC thin films10.1016/j.optmat.2017.09.031 ↗

24. Nitrogen doping of SiC thin films deposited by RF magnetron sputtering10.1007/s10854-007-9487-y ↗

25. Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films10.1016/j.ceramint.2021.05.120 ↗

26. Si-rich a-Si1−xCx thin films by d.c. magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties10.1016/j.apsusc.2012.10.129 ↗

27. Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers10.1016/j.vacuum.2021.110319 ↗

28. Structural and electrical characterization of annealed Si1−xCx/SiC thin film prepared by magnetron sputtering10.1088/1674-1056/23/5/058105 ↗

29. Characterization of SiC Thin Film Obtained by Magnetron Reactive Sputtering: IBA, IR and Raman Studies10.4028/www.scientific.net/MSF.483-485.287 ↗

30. High-energy heavy ion beam annealing effect on ion beam synthesis of silicon carbide10.1016/j.surfcoat.2011.04.058 ↗

31. Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition10.1155/2008/760650 ↗

32. Microstructure, mechanical and high-temperature tribological properties of amorphous SiC films by pulsed magnetron sputtering10.1016/j.jnoncrysol.2022.121949 ↗

33. Synthesis of Cubic Nanocrystalline Silicon Carbide (3C-SiC) Films by HW-CVD Method10.1007/s12633-015-9358-8 ↗

34. Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining10.3390/mi9070361 ↗

35. Comparative Study of Hydrogen and Argon Dilution Effects in Amorphous SiC Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition10.1166/jnn.2015.10587 ↗

36. Spectroscopic investigation of thermally induced structural evolution of a-C:H: Si film10.1016/j.apsusc.2020.148413 ↗

37. Characterizations of pulsed laser deposited SiC thin films10.1016/j.jnoncrysol.2007.07.008 ↗

38. The influence of local SiC bonding density on the photoluminescence of Si-QDs upon thermal annealing the hydrogenated amorphous Si-rich silicon carbide thin films10.1016/j.jnoncrysol.2017.02.016 ↗

39. Confinement induced variation of composition ratio in amorphous silicon carbide thin films and effect in optical properties10.1016/j.jnoncrysol.2020.120009 ↗

40. Investigation and characterisation of silicon nitride and silicon carbide thin films10.1016/S0257-8972(03)00695-9 ↗

41. Parasitic Absorption Reduction in Metal Oxide-Based Transparent Electrodes: Application in Perovskite Solar Cells10.1021/acsami.6b04425 ↗

42. Defect Inspection Techniques in SiC10.1186/s11671-022-03672-w ↗