journal article·2023-01

Dual near-zero-thickness sealing for the strengthening of cobalt thin films and nanolines for future interconnect applications

Giin-Shan Chen, Yen-Chang Pan, Wei-Chun Chen, Chien-Nan Hsiao, Chin-Chia Chang, Yi-Lung Cheng, Jau-Shiung Fang

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OpenAlex topics: Molecular Junctions and Nanostructures · Copper Interconnects and Reliability · Semiconductor materials and interfaces

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