Environmental stability and ageing of ScN thin films from XPS Ar+ depth profiling
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Advanced ceramic materials synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (64)
Show source-provided references
1. Thermoelectric properties of epitaxial ScN films deposited by reactive magnetron sputtering onto MgO(001) substrates10.1063/1.4801886 ↗
2. Anomalously high thermoelectric power factor in epitaxial ScN thin films10.1063/1.3665945 ↗
3. Thermoelectric properties of HfN/ScN metal/semiconductor superlattices: a first-principles study10.1088/0953-8984/24/41/415303 ↗
4. Valence and conduction band alignment at ScN interfaces with 3C-SiC (111) and 2H-GaN (0001)10.1063/1.4894010 ↗
5. Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties10.1063/1.368913 ↗
6. Molecular beam epitaxy control of the structural, optical, and electronic properties of ScN(001)10.1063/1.1388161 ↗
7. Epitaxial growth and properties of semiconducting ScN10.1016/0022-0248(72)90185-6 ↗
8. P. Ettmayer, W. Lengauer, Nitrides, Ullmann’s Encyclopedia of Industrial Chemistry. https://doi.org/10.1002/14356007.a17_341.10.1002/14356007.a17_341 ↗
9. K.L. Roberts, L. Convington Jr., Nitrides, Kirk-Othmer Encyclopedia of Chemical Technology. https://doi.org/10.1002/0471238961.1409201813011811.a01.pub2.10.1002/0471238961.1409201813011811.a01.pub2 ↗
10. Emeleus · 1966
11. Formation and reactivity of nitrides I. Review and introduction10.1002/jctb.5010180301 ↗
12. Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles10.1016/j.apsusc.2022.156203 ↗
13. Some effects of oxygen impurities on AlN and GaN10.1016/S0022-0248(02)01753-0 ↗
14. Phase separation and optical properties in oxygen-rich InN films10.1063/1.2963498 ↗
15. Structural, electronic and optical properties of (Sc, Y)N solid solutions10.1016/j.tsf.2008.09.076 ↗
16. Variation of color in titanium and zirconium nitride decorative thin films10.1016/S0040-6090(02)00530-8 ↗
17. Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films10.1063/1.2957654 ↗
18. High thermoelectric power factor in ambient-stable semiconducting rare-earth ErN thin films10.1063/5.0041879 ↗
19. Point defects and p -type doping in ScN from first principles10.1103/PhysRevApplied.9.034019 ↗
20. Correlation between crystallization and oxidation process of ScN films exposed to air10.1016/j.apsusc.2020.145968 ↗
21. Oxidation of titanium nitride in room air and in dry O210.1063/1.349194 ↗
22. Electrical and optical properties of scandium nitride nanolayers on MgO (100) substrate10.1063/1.5056245 ↗
23. The effect of oxygen incorporation in sputtered scandium nitride films10.1016/j.tsf.2008.05.050 ↗
24. High mobility single crystalline ScN and single-orientation epitaxial YN on sapphire via magnetron sputtering10.1063/1.2996006 ↗
25. Effect of deposition pressure on the microstructure and thermoelectric properties of epitaxial ScN(001) thin films sputtered onto MgO(001) substrates10.1557/jmr.2015.30 ↗
26. Phase stability, nitrogen vacancies, growth mode, and surface structure of ScN(001) under Sc-rich conditions10.1016/S0022-0248(02)01447-1 ↗
27. Eklund, Effect of impurities on morphology, growth mode, and thermoelectric properties of (1 1 1) and (0 0 1) epitaxial-like ScN films10.1088/1361-6463/aaeb1b ↗
28. Atomistic structure and three-dimensional spatial distribution of oxide clusters along voids in nitride metal/semiconductor superlattices
29. Positron structural analysis of ScN Films deposited on MgO substrate10.12693/APhysPolA.137.209 ↗
30. High mobility and high thermoelectric power factor in epitaxial ScN thin films deposited with plasma-assisted molecular beam epitaxy10.1063/5.0004761 ↗
31. Effects of adatom mobility and Ehrlich-Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films10.1063/5.0027091 ↗
32. Time-dependent evolution of thin TiN films prepared by ion beam assisted deposition10.1063/1.371561 ↗
33. Titanium nitride oxidation chemistry: An x-ray photoelectron spectroscopic study10.1063/1.351465 ↗
34. Bernard, Special quasirandom structures10.1103/PhysRevLett.65.353 ↗
35. Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set10.1103/PhysRevB.54.11169 ↗
36. Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set10.1016/0927-0256(96)00008-0 ↗
37. Rationale for mixing exact exchange with density functional approximations10.1063/1.472933 ↗
38. From ultrasoft pseudopotentials to the projector augmented-wave method10.1103/PhysRevB.59.1758 ↗
39. Electronic structure of ScN10.1103/PhysRevB.34.3876 ↗
40. Investigations in the scandium-nitrogen system10.1016/0022-4596(88)90236-8 ↗
41. Microstructural evolution and Poisson ratio of epitaxial ScN grown on TiN(001)/MgO(001) by ultrahigh vacuum reactive magnetron sputter deposition10.1063/1.371555 ↗
42. Surface and bulk electronic structure of ScN(001) investigated by scanning tunneling microscopy/spectroscopy and optical absorption spectroscopy10.1103/PhysRevB.70.045303 ↗
43. Optical and transport measurement and first-principles determination of the ScN band gap10.1103/PhysRevB.91.045104 ↗
44. R.F.W. Bader, Atoms in Molecules: A Quantum Theory, Clarendon Press, 1990.10.1093/oso/9780198551683.001.0001 ↗
45. A fast and robust algorithm for Bader decomposition of charge density10.1016/j.commatsci.2005.04.010 ↗
46. Comparing XPS on bare and capped ZrN films grown by plasma enhanced ALD: Effect of ambient oxidation10.1016/j.apsusc.2017.11.104 ↗
47. Epitaxial ScN(001) Grown and Analyzed In situ by XPS and UPS. I. Analysis of As-deposited Layers10.1116/1.1365376 ↗
48. Epitaxial ScN(001) Grown and analyzed in situ by XPS and UPS. II. Analysis of Ar+ sputter etched layers10.1116/1.1365377 ↗
49. In situ X-ray Photoelectron, Ultraviolet Photoelectron, and Auger Electron Spectroscopy Spectra from First-Row Transition-Metal Nitrides: ScN, TiN, VN and CrN10.1116/1.1360984 ↗
50. XPS guide: Charge neutralization and binding energy referencing for insulating samples10.1116/6.0000057 ↗
51. Nature of the use of adventitious carbon as a binding energy standard10.1116/1.579868 ↗
52. The XPS Library (xpslibrary.com).
53. The International XPS Database (xpsdatabase.net).
54. X-ray Photoelectron Spectroscopy (XPS) Reference Pages (www.xpsfitting.com).
55. X-ray photoelectron spectroscopy studies of reactions on chromium metal and chromium oxide surfaces10.1016/j.elspec.2010.12.001 ↗
56. Unintentional carbide formation evidenced during high vacuum magnetron sputtering of transition metal nitride films10.1016/j.apsusc.2016.05.129 ↗
57. Studies of the hot-pressed TiN material by electron spectroscopies10.1016/j.jallcom.2012.08.089 ↗
58. X-ray photoelectron studies of scandium and its hydride and oxide10.1088/0305-4608/7/11/005 ↗
59. Stoichiometric ScN and nitrogen deficient scandium nitride layers studied by photoelectron spectroscopy10.1088/0022-3719/18/36/024 ↗
60. Elemental binding energies for X-ray photoelectron spectroscopy10.1016/0169-4332(95)00027-5 ↗
61. Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn10.1016/j.apsusc.2010.07.086 ↗
62. A step-by-step guide to perform x-ray photoelectron spectroscopy
63. Cathodoluminescence and x-ray photoelectron spectroscopy of ScN: dopant, defects, and band structure10.1063/5.0019533 ↗
64. In situ X-ray photoelectron, ultraviolet photoelectron, and auger electron spectroscopy spectra from first-row transition-metal nitrides: ScN, TiN, VN, and CrN10.1116/1.1360984 ↗