Structural and gas sensing properties of ex-situ oxidized Sn grown by thermal evaporation
Source abstract
Abstract
Abstract SnO 2 thin films were obtained by ex-situ oxidation of Sn metal film deposited by thermal evaporation. The oxidation of the Sn film was carried out at 600, 700 and 900 °C for 2 h in a controlled oxygen atmosphere. GIXRD confirmed the tetragonal rutile phase of SnO 2 which was further confirmed by Raman spectroscopy. The RBS measurements provided the thickness and chemical information of the film. Thickness of the film was in the range of 6⿿12 nm and the presence of Sn and oxygen in the films are shown. Scanning electron microscopy revealed spherical particles of different sizes for films annealed at different temperatures. The SnO 2 thin film oxidized at 900 °C was tested for methane gas sensing. A sensing response of 78.46% for 100 ppm of methane at an operating temperature of 100 °C which is one of lowest reported was obtained.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · ZnO doping and properties · Advanced Chemical Sensor Technologies
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