Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Jonathan L. Partridge; Aziz I. Abdulagatov; Varun Sharma; Jessica A. Murdzek; Andrew Cavanagh; Steven M. George

doi:10.1016/j.apsusc.2023.157923

journal article·2023-11

Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Jonathan L. Partridge, Aziz I. Abdulagatov, Varun Sharma, Jessica A. Murdzek, Andrew Cavanagh, Steven M. George

Applied Surface Science· Volume 638

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OpenAlex topics: Semiconductor materials and devices · ZnO doping and properties · Plasma Diagnostics and Applications

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