Deposition of amorphous carbon nitride thin films using pressure-gradient RF magnetron sputtering and their chemical bonding structures
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
Show source-provided references
1. Prediction of New Low Compressibility Solids10.1126/science.245.4920.841 ↗
2. Structural properties and electronic structure of low-compressibility materials: β-Si3N4 and hypothetical β-C3N410.1103/PhysRevB.41.10727 ↗
3. In the validity of the formation of crystalline carbon nitrides, C3N410.1016/S0925-9635(99)00103-X ↗
4. On a new model of the graphitic form of C3N410.1016/S0038-1098(98)00631-0 ↗
5. Optical properties of graphitic carbon nitride films prepared by evaporation10.1016/j.diamond.2016.02.008 ↗
6. Crystalline carbon nitride semiconductors for photocatalytic water splitting10.1002/ange.201809897 ↗
7. Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres10.1016/j.jnoncrysol.2004.03.034 ↗
8. Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVED hybrid coating process10.1016/j.apsusc.2012.03.082 ↗
9. Study of Amorphous Carbon Nitride Films Aiming at White Light Emitting Devices10.1143/JJAP.47.7842 ↗
10. Deposition of amorphous carbon nitride films using Ar/N2 supermagnetron sputter10.1016/j.tsf.2009.11.051 ↗
11. Structural, electrical, and optical properties of amorphous carbon nitride films prepared using a hybrid deposition technique10.1016/j.diamond.2015.07.012 ↗
12. Nitta · 2002 · 62
13. Amorphous carbon nitride deposition by nitrogen radical sputtering C+N+O+H10.1016/S0925-9635(03)00073-6 ↗
14. Preparation and properties of reactive-sputtered amorphous CNx films10.1016/S0169-4332(96)00772-6 ↗
15. Structural and piezoelectric properties of AlN thin films grown by pressure gradient sputtering10.35848/1347-4065/ac762f ↗
16. http://www.kenix.jp/product/spattaringimg/PGS.pdf.
17. Interpretation of X-ray photoelectron spectra of carbon-nitride thin films: New insights from in situ XPS10.1016/j.carbon.2016.07.017 ↗
18. Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry10.1017/S1431927614000439 ↗
19. Polarization property measurement of the long undulator radiation using Cr/C multilayer polarization elements
20. Characterization of light radiated from 11 m Long undulator
21. Optical properties of amorphous hydrogenated carbon thin films10.1016/S0022-3093(00)00431-2 ↗
22. Plasma diagnostic studies to the carbon nitride film deposition by reactive r.f. magnetron sputtering10.1016/S0040-6090(96)09199-7 ↗
23. Origins of sp3C peaks in C1s X-ray photoelectron spectra of carbon materials10.1021/acs.analchem.6b01327 ↗
24. Hydrogen-dominated metal free growth of graphitic-nitrogen doped graphene with n-type transport behaviors10.1016/j.carbon.2020.01.051 ↗
25. Soft X-ray emission study of nano-structured carbon10.1016/j.elspec.2004.02.029 ↗
26. Soft X-ray emission spectroscopy study of characteristic bonding states and its distribution of amorphous carbon-nitride (a-CNx) films10.1093/jmicro/dfy024 ↗
27. Electron-energy-loss spectra of crystalline C8410.1103/PhysRevB.49.5054 ↗
28. Theoretical identification of buckyonion fullerene C20@C60 isomers by XPS and NEXAFS spectroscopy10.1016/j.saa.2019.117904 ↗
29. Analysis of the π* and σ* bonds of the x-ray absorption spectrum of amorphous carbon10.1103/PhysRevB.64.125204 ↗
30. Comparative study of the structure of a-CNx and a-CNx: H films using NEXAFS, XPS and FT-IR analysis10.1016/j.tsf.2004.11.134 ↗
31. NEXAFS study and electrical properties of nitrogen-incorporated tetrahedral amorphous carbon films10.1016/j.diamond.2005.01.032 ↗
32. Synchrotron based NEXAFS study on nitrogen doped hydrothermal carbon: Insights into surface functionalities and formation mechanisms10.1016/j.carbon.2016.12.057 ↗
33. XPS and NEXAFS characterization of plasma deposited vertically aligned N-doped MWCNT10.1016/j.diamond.2004.10.011 ↗