Growth of diamond-like carbon films with significant nanocrystalline phases in a low-pressure high-density CH4 plasma in ICP-CVD: Effect of negative dc substrate bias
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · High-pressure geophysics and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (77)
Show source-provided references
1. A critical review of chemical vapor-deposited (CVD) diamond for electronic applications10.1080/10408430008951119 ↗
2. Influence of substrate surface topography in the deposition of nanostructured diamond-like carbon films by high density plasma chemical vapor deposition Surf10.1016/j.surfcoat.2008.10.025 ↗
3. D. Das, Nanocrystalline Diamond: A High-Impact Carbon Nanomaterial for Multifunctional Applications Including as Nanofiller. In: Yaragalla, Mishra, Thomas, Kalarikkal and Maria (Eds.), Carbon-Based Nanofillers and their Rubber Nanocomposite. Elsevier: Amsterdam, The Netherlands, (2019) 123–181.10.1016/B978-0-12-813248-7.00005-5 ↗
4. Raman spectroscopy of amorphous nanostructured, diamond-like carbon and nanodiamond10.1098/rsta.2004.1452 ↗
5. Properties of hydrogenated DLC films as prepared by a combined method of plasma source ion implantation and unbalanced magnetron sputtering10.1557/jmr.2011.341 ↗
6. Anti-reflection coatings for silicon solar cells from hydrogenated diamond like carbon10.1016/j.apsusc.2015.03.124 ↗
7. Field emission from hybrid diamond-like carbon and carbon nanotube composite structures10.1021/am403386a ↗
8. Modulation of field emission properties of DLC films with the incorporation of nanocrystalline silver nanoparticles by CVD technique10.1016/j.surfcoat.2010.05.019 ↗
9. Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap10.1007/s42823-020-00199-x ↗
10. Synthesis of DLC films with different sp2/sp3 ratios and their hydrophobic behaviour10.1088/0022-3727/41/5/055309 ↗
11. Quantitative analysis of hydrogenated diamond like carbon films by visible Raman spectroscopy10.1063/1.2219983 ↗
12. Nanocomposite and nanostructured tribological materials for space applications
13. Klyui · 2011 · 2787
14. Raman analysis of DLC and Si-DLC films deposited on nitrile rubber10.1016/j.surfcoat.2013.06.013 ↗
15. Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3ratio from XPS spectra of annealed hydrogenated DLC film10.2320/matertrans.47.1847 ↗
16. Deposition of Ti-containing diamond-like carbon (DLC) films by PECVD technique10.1016/j.msec.2006.06.027 ↗
17. Realization of different carbon nanostructuresby microwave plasma enhanced chemical vapour deposition technique10.1016/S0169-4332(01)00422-6 ↗
18. Coating of diamond-like carbon nanofilm on alumina by microwave plasma enhanced chemical vapor deposition process10.1166/jnn.2012.5384 ↗
19. Growth and properties of hydrogen-free DLC films deposited by surface-wave-sustained plasma10.1016/j.diamond.2006.04.013 ↗
20. Synthesis of diamond using a low pressure, radio frequency inductively coupled plasma10.1116/1.581516 ↗
21. Review of inductively coupled plasmas for plasma processing10.1088/0963-0252/1/2/006 ↗
22. Structural studies of n-type nc-Si–QD thin films for nc-Si solar cells10.1016/j.jpcs.2017.07.026 ↗
23. Vertically aligned Si nanocrystals embedded in amorphous Si matrix prepared by inductively coupled plasma chemical vapour deposition (ICP-CVD)10.1016/j.mseb.2015.02.013 ↗
24. Autogenic single p/n-junction solar cells from black-Si nano-grass structures of p-to-n type self-converted electronic configuration10.1039/D0NR03927F ↗
25. Nanostructured diamond-like carbon films characterization10.1016/j.jallcom.2009.10.195 ↗
26. Effects of nano-diamond seeds on mechanical properties and surface morphology of diamond-like carbon films10.4028/www.scientific.net/AMM.723.502 ↗
27. Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films10.1016/j.tsf.2006.04.018 ↗
28. Annealing effects on structure and optical properties of diamond-like carbon films containing silver10.1186/s11671-016-1362-4 ↗
29. Nanocrystalline diamond produced by direct current micro-plasma: investigation of growth dynamics10.1016/j.diamond.2017.03.011 ↗
30. Phonon confinement effects in the Raman spectrum of nanodiamond10.1103/PhysRevB.80.075419 ↗
31. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
32. Effect of HF wet-etching and H2-plasma polishing on the low-temperature growth of carbon nanotubes on stainless-steel substrates10.1016/j.jpcs.2021.110307 ↗
33. Low temperature growth of carbon nanotubes by microwave plasma stimulated by CO2 as weak oxidant and guided by shadow masking10.1016/j.diamond.2018.07.007 ↗
34. Multipeak fitting analysis of Raman spectra on DLCH film10.1002/jrs.2234 ↗
35. Raman micro spectroscopy of soot and related carbonaceous materials: spectral analysis and structural information10.1016/j.carbon.2005.02.018 ↗
36. Synthesis of diameter controlled multiwall carbon nanotubes by microwave plasma-CVD on low-temperature and chemically processed Fe nanoparticle catalysts10.1016/j.apsusc.2020.146043 ↗
37. Thermal stability of metal-doped diamond-like carbon fabricated by dual plasma deposition10.1016/j.diamond.2005.03.006 ↗
38. Structural and mechanical properties of DLC films prepared by bipolar PBII & D10.1016/j.diamond.2011.04.003 ↗
39. Diamond-like amorphous carbon10.1016/S0927-796X(02)00005-0 ↗
40. Synthesis of single-walled, bamboo-shaped and Y-junction carbon nanotubes using microwave plasma CVD on low-temperature and chemically processed catalysts10.1016/j.jpcs.2021.109971 ↗
41. The influence of boron doping level on quality and stability of diamond film on Ti substrate10.1016/j.apsusc.2012.03.134 ↗
42. Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction10.1016/S0008-6223(03)00071-X ↗
43. Micro-Raman for diamond film stress analysis10.1016/0925-9635(94)05319-7 ↗
44. Further improvements of nano-diamond structures on unheated substrates by optimization of parameters with secondary plasma in MW-PECVD10.1016/j.surfcoat.2015.03.042 ↗
45. Detection of phenol at boron-doped nanocrystalline diamond electrodes10.1016/j.jelechem.2011.04.020 ↗
46. The origin of conductivity in ion-irradiated diamond-like carbon – Phase transformation and atomic ordering10.1016/j.carbon.2014.09.012 ↗
47. Growth and characterization of nanocrystalline diamond/amorphous carbon composite films prepared by MWCVD10.1016/j.diamond.2003.11.040 ↗
48. Analysis of chemical vapour deposited diamond films by X-ray photoelectron spectroscopy10.1016/S0368-2048(01)00334-6 ↗
49. Electrical transport phenomena prevailing in undoped nc-Si/a-SiNx:H thin films prepared by inductively coupled plasma chemical vapor deposition10.1063/1.4818512 ↗
50. High throughput light absorber discovery, Part 1: an algorithm for automated Tauc analysis10.1021/acscombsci.6b00053 ↗
51. Transparent and conducting intrinsic ZnO thin films prepared at high growth-rate with c-axis orientation and pyramidal surface texture10.1016/j.apsusc.2013.09.099 ↗
52. Assessing Tauc plot slope quantification: ZnO thin films as a model system10.1002/pssb.201700393 ↗
53. A novel approach towards silicon nanotechnology10.1088/0022-3727/36/19/004 ↗
54. Growth, electronic properties and applications of nanodiamond10.1016/j.diamond.2008.01.103 ↗
55. Comparing internal stress in diamond-like carbon films with different structure10.1016/j.tsf.2007.02.069 ↗
56. Characterization of diamond-like carbon films by SEM, XRD and Raman spectroscopy10.1016/j.apsusc.2010.04.025 ↗
57. Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD10.1016/j.apsusc.2021.152132 ↗
58. Hydrogen plasma induced microcrystallization in layer-by-layer growth scheme10.1016/j.solmat.2003.10.004 ↗
59. Quantum confinement effects in nano-silicon thin films10.1016/S0038-1098(98)00478-5 ↗
60. Diamond thin films: a 21st-century material10.1098/rsta.2000.0542 ↗
61. Current issues and problems in the chemical vapor deposition of diamond10.1126/science.247.4943.688 ↗
62. Deposition and microstructure of Ti-containing diamond-like carbon nanocomposite films10.1016/j.tsf.2004.07.077 ↗
63. Gaseous precursors of diamond like carbon films in Ar/CH4 plasmas10.1016/S0009-2614(00)00949-0 ↗
64. Elementary reaction mechanism for growth of diamond (100) surfaces from methyl radicals10.1021/j100079a030 ↗
65. Deposition of DLC films in CH4/Ar and CH4/Xe r.f. plasmas10.1016/0925-9635(95)00495-5 ↗
66. Controlling the growth of nanocrystalline silicon by tuning negative substrate bias10.1016/j.solmat.2011.06.048 ↗
67. Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4 plasma at low temperature10.1557/jmr.2012.4 ↗
68. Formation and structure of a-C/nanodiamond composite films by prolonged bias enhanced nucleation10.1016/S0925-9635(03)00264-4 ↗
69. Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition10.1063/1.1492864 ↗
70. Deposition and characterization of nanocrystalline diamond films prepared by ion bombardment-assisted method10.1063/1.1305460 ↗
71. Promotion of microcrystallization by argon in moderately hydrogen diluted silane plasma10.1016/S0927-0248(02)00121-6 ↗
72. Role of hydrogen in controlling the growth of µc-Si:H films from argon diluted SiH4 plasma10.1063/1.1454201 ↗
73. Nucleation of diamond films on heterogeneous substrates: a review10.1039/D1RA00397F ↗
74. XPS and laser Raman analysis of hydrogenated amorphous carbon films10.1016/S0925-9635(02)00374-6 ↗
75. Effect of surface structure and wettability of DLC and N-DLC thin films on adsorption of glycine10.1016/j.apsusc.2012.01.162 ↗
76. Low temperature synthesis of spherical nano-diamond10.1080/17458080.2012.720039 ↗
77. Growth of nanostructured diamond films on glass substrates by low-temperature microwave plasma-enhanced chemical vapor deposition for applications in nanotribology10.1021/acsanm.1c04175 ↗