Search for novel amorphous alloys with high crystallization temperature by combinatorial arc plasma deposition

This paper describes a combinatorial search for novel amorphous alloys with high crystallization temperatures (T x ) using combinatorial arc plasma deposition (CAPD). The CAPD technique can deposit 1089 (33 x 33) thin film samples with different compositions on a substrate at one time. These 1089 samples on the substrate are individually referred to as CAPD samples and collectively referred to as a thin film library. Thin film libraries of Ir-Zr-Fe, Ir-Zr-Al, Mo-Zr-Al, Mo-Zr-Si, Ru-Zr-Fe and Ru-Zr-Si were deposited by CAPD. The compositions and phases of the CAPD samples were measured by energy dispersive X-ray fluorescence spectrometry and X-ray diffractometry, respectively. The results revealed that each library included amorphous CAPD samples. Since it is impossible to measure the T x , fracture strength, fracture strain and Young's modulus of the CAPD samples by conventional measurement methods, larger samples having the same compositions as the amorphous CAPD samples were fabricated by a sputtering system. Since all CAPD samples of Ir-Zr-Fe and Ir-Zr-Al were too brittle, their corresponding sputter-deposited samples were not prepared. Sputter-deposited Mo-Zr-Al, Mo-Zr-Si, Ru-Zr-Fe and Ru-Zr-Si samples with ∼50 at.% Mo- or Ru-content were fabricated, and T x and mechanical properties of these sputter-deposited samples were evaluated. All the sputter-deposited samples of Mo-Zr-Al and Mo-Zr-Si showed high T x exceeding 973 K and as well as brittle characteristics. Ru 50 Zr 35 Fe 10 samples showed high T x exceeding 1273 K and a low fracture strength of 0.26 GPa. Samples of Ru 51 Zr 5 Si 44 showed a high T x of 923 K and a high fracture strength of 1.25 GPa.