Atomic Layer Deposition of oriented nickel titanate (NiTiO3)
Source abstract
Abstract
Abstract The combination of the two well behaved binary oxide ALD processes, NiO (Ni(acac) 2 + O 3 ) and (TiO 2 (TiO i Pr) 4 + H 2 O), provide excellent means for depositing thin films of Ni x Ti 1− x O y with highly controllable stoichiometry. In particular, stoichiometric NiTiO 3 was obtained for a 1:1 molar pulsing ratio of NiO:TiO 2 . An ALD window was observed between 175 and 275 °C for this composition, within which the growth rate remained unchanged at ∼43 pm/subcycle. The measured refractive index was 2.42 and a direct band gap of 2.27 eV was found. The described process yielded smooth (0.4–0.9 nm RMS roughness), crystalline films of NiTiO 3 as-deposited on Si (1 0 0) substrates, with a strained (0 0 1) orientation. Annealing at 650 °C for 15 min relaxed the strain and improved the crystallinity.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Semiconductor materials and devices · ZnO doping and properties · Electronic and Structural Properties of Oxides
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (46)
Show source-provided references
1. Neutron-diffraction study of antiferromagnetic FeTiO3 and its solid solutions with α-Fe2O310.1016/0022-3697(59)90122-2 ↗
2. Electronic, magnetic and dielectric properties of multiferroic MnTiO310.1557/jmr.2012.101 ↗
3. Coexistence of weak ferromagnetism and polar lattice distortion in epitaxial NiTiO3 thin films of the LiNbO3-type structure10.1116/1.4801664 ↗
4. Epitaxial growth of NiTiO3 with a distorted ilmenite structure10.1016/j.tsf.2012.04.060 ↗
5. Microstructures and dielectric properties of MgTiO3 thick film prepared using aerosol deposition method10.1080/00150193.2012.740284 ↗
6. Preparation and gas-sensing properties of nano-CoTiO310.1016/S0025-5408(99)00167-1 ↗
7. Preparation of zinc titanate nanoparticles and their photocatalytic behaviors in the photodegradation of humic acid in water10.1016/j.ceramint.2012.01.078 ↗
8. Order-disorder transition-induced twin domains and magnetic properties in ilmenite–hematite
9. Magnetic exchange bias of more than 1Tesla in a natural mineral intergrowth10.1038/nnano.2007.292 ↗
10. Photooxidation of water by NiTiO3 deposited from single source precursor [Ni2Ti2(OEt)2(μ-OEt)6(acac)4] by AACVD10.1039/b818765g ↗
11. Fabrication and characterization of high-k dielectric nickel titanate thin films using a modified sol–gel method10.1111/j.1551-2916.2010.04037.x ↗
12. Mesoporous and nanocrystalline sol–gel derived NiTiO3 at the low temperature: controlling the structure, size and surface area by Ni:Ti molar ratio10.1016/j.solidstatesciences.2010.07.015 ↗
13. Memory conductance switching in a Ni–Ti–O compound thin film10.7567/JJAP.51.104102 ↗
14. Atomic layer deposition: an overview10.1021/cr900056b ↗
15. Studies of NiO thin film formation by atomic layer epitaxy10.1016/S0921-5107(98)00135-4 ↗
16. Atomic layer deposition of NiO films on Si(100) using cyclopentadienyl-type compounds and ozone as precursors10.1149/1.2965456 ↗
17. Stoichiometry of nickel oxide films prepared by ALD10.1002/cvde.201004300 ↗
18. Substrate dependent growth behaviors of plasma-enhanced atomic layer deposited nickel oxide films for resistive switching application10.1021/cm302182s ↗
19. Thin MnO and NiO films grown using atomic layer deposition from ethylcyclopentadienyl type of precursors10.1016/j.jcrysgro.2008.08.031 ↗
20. Atomic layer deposition of NiO by the Ni(thd)2/H2O precursor combination10.1002/cvde.200906762 ↗
21. Atomic layer deposition of nickel oxide films using Ni(dmamp)2 and water10.1116/1.1875172 ↗
22. NiO thin films synthesized by atomic layer deposition using Ni(dmamb)2 and ozone as precursors10.1002/cvde.201106949 ↗
23. Crystallinity of inorganic films grown by atomic layer deposition: overview and general trends10.1063/1.4757907 ↗
24. Lamellar magnetism in the haematite-ilmenite series as an explanation for strong remanent magnetization10.1038/nature00942 ↗
25. Nature and origin of lamellar magnetism in the hematite–ilmenite series10.2138/am-2004-5-607 ↗
26. Reaction mechanism studies on titanium isopropoxide-water atomic layer deposition process10.1002/1521-3862(20020116)8:1<21::AID-CVDE21>3.0.CO;2-0 ↗
27. 2009
28. 1994
29. Titanium isopropoxide as a precursor for atomic layer deposition. Characterization of titanium dioxide growth process10.1016/S0169-4332(00)00274-9 ↗
30. Identification of cis/trans isomers of bis(acetylacetonato)nickel(II) complexes in solution based on electronic spectra10.1016/j.ica.2009.09.011 ↗
31. The crystal and molecular structure of bis(acetylacetonato)-nickel(II)10.1021/ic50026a005 ↗
32. Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films10.1021/cm00032a023 ↗
33. Effect of annealing in processing of strontium titanate thin films by ALD10.1016/S0169-4332(03)00175-2 ↗
34. Effect of water dose on the atomic layer deposition rate of oxide thin films10.1016/S0040-6090(00)00890-7 ↗
35. Equilibrium relations in the system nickel(II) oxide-titania in the temperature range 1300° to 1750°C10.1111/j.1151-2916.1992.tb04194.x ↗
36. Growth of La1−xCaxMnO3 thin films by atomic layer deposition10.1039/B616982A ↗
37. Optical properties and electronic structure of amorphous germanium10.1002/pssb.19660150224 ↗
38. Electrical conduction in NiTiO3 single crystals10.1016/0254-0584(95)01478-0 ↗
39. The absolute energy positions of conduction and valence bands of selected semiconducting minerals10.2138/am-2000-0416 ↗
40. Intermetallic charge transfer and band gap of MTiO3 (M=Mn, Fe, Co, and Ni) studied by O 1s-edge X-ray emission spectroscopy10.1016/j.elspec.2011.06.001 ↗
41. Synthesis and characterization of ilmenite NiTiO3 and CoTiO3 prepared by a modified Pechini method10.1016/j.jnoncrysol.2006.02.001 ↗
42. Synthesis and characterisation of nano-sized nickel titanate photocatalyst10.1080/17458080.2011.566631 ↗
43. Water photoelectrolysis using nickel titanate and niobate as photoanodes10.1016/0022-4596(82)90359-0 ↗
44. Effect of reaction temperature on size and optical properties of NiTiO3 nanoparticles10.1155/2012/607289 ↗
45. Preparation and photocatalytic properties of ilmenite NiTiO3 powders for degradation of humic acid in water10.1007/s12613-012-0566-6 ↗
46. Chemical and magnetic properties of rapidly cooled metastable ferri-ilmenite solid solutions: implications for magnetic self-reversal and exchange bias—III. Magnetic interactions in samples produced by Fe-Ti ordering