journal article·2022-07

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Xiuyun Li, Ruiyan Li, Zhi Yu, Jun Xing, Wenchi Kong, Yue Wang, Jianjun Yang

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Laser Material Processing Techniques · Photonic Crystals and Applications · Nonlinear Optical Materials Studies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (55)

Show source-provided references
1. Microstructuring of silicon with femtosecond laser pulses10.1063/1.122241 ↗
2. Antireflection effect of femtosecond laser-induced periodic surface structures on silicon10.1364/OE.19.0A1031 ↗
3. Magnetic plasmon resonances in nanostructured topological insulators for strongly enhanced light-MoS2 interactions10.1038/s41377-020-00429-x ↗
4. Resonant laser printing of structural colors on high-index dielectric metasurfaces10.1126/sciadv.1602487 ↗
5. Surface plasmon resonance of layer-by-layer gold nanoparticles induced photoelectric current in environmentally-friendly plasmon-sensitized solar cell10.1038/lsa.2012.14 ↗
6. Spectral absorption control of femtosecond laser-treated metals and application in solar-thermal devices10.1038/s41377-020-0242-y ↗
7. Surface-Plasmon-Mediated Programmable Optical Nanofabrication of an Oriented Silver Nanoplate10.1021/nn5029345 ↗
8. A Generalized Methodology of Designing 3D SERS Probes with Superior Detection Limit and Uniformity by Maximizing Multiple Coupling Effects10.1002/advs.201900177 ↗
9. Femtosecond Photon-Mediated Plasma Enhances Photosynthesis of Plasmonic Nanostructures and Their SERS Applications10.1002/smll.201804899 ↗
10. Metallic subwavelength-cavity semiconductor nanolasers10.1038/lsa.2012.20 ↗
11. Surface plasmon modes of nanomesh-on-mirror nanocavities prepared by nanosphere lithography10.1039/C8NR05499A ↗
12. Multifunctional Metasurface: Coplanar Embedded Design for Metalens and Nanoprinted Display10.1021/acsphotonics.9b01795 ↗
13. Experiments on second- and third-harmonic generation from magnetic metamaterials10.1364/OE.15.005238 ↗
14. Direct Color Printing with an Electron Beam10.1021/acs.nanolett.0c01191 ↗
15. Effect of Molecular Adsorption on the Electrical Conductance of Single Au Nanowires Fabricated by Electron-Beam Lithography and Focused Ion Beam Etching10.1002/smll.201001295 ↗
16. Multi-wavelength sampled Bragg grating quantum cascade laser arrays10.1364/PRJ.6.000721 ↗
17. Femtosecond-Laser Direct Writing of Metallic Micro/Nanostructures: From Fabrication Strategies to Future Applications10.1002/smtd.201700413 ↗
18. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon10.1038/s41566-017-0004-4 ↗
19. Ultrafast laser processing of materials: a review10.1364/AOP.7.000684 ↗
20. Semiconductor Surface Damage Produced by Ruby Lasers10.1063/1.1703071 ↗
21. Anisotropic Resistivity Surfaces Produced in ITO Films by Laser-Induced Nanoscale Self-organization10.1002/adom.202001086 ↗
22. Formation of Slantwise Surface Ripples by Femtosecond Laser Irradiation10.3390/nano8070458 ↗
23. Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams10.1016/j.apsusc.2018.12.029 ↗
24. L. Wang, Q.D. Chen, X.W. Cao, R. Buividas, X. Wang, S. Juodkazis, H.B. Sun, Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing, Light: Sci. Appl. 6(2017) e17112.10.1038/lsa.2017.112 ↗
25. A self-driven microfluidic surface-enhanced Raman scattering device for Hg2+ detection fabricated by femtosecond laser10.1039/C9LC00883G ↗
26. Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification10.1515/nanoph-2019-0056 ↗
27. An investigation on 800 nm femtosecond laser ablation of K9 glass in air and vacuum10.1016/j.apsusc.2017.02.043 ↗
28. Periodic surface structures on dielectrics upon femtosecond laser pulses irradiation10.1364/OE.27.008983 ↗
29. Formation and Properties of Laser-Induced Periodic Surface Structures on Different Glasses10.3390/ma10080933 ↗
30. Femtosecond laser direct writing of large-area two-dimensional metallic photonic crystal structures on tungsten surfaces10.1364/OE.23.026617 ↗
31. 3D Microfluidic Surface-Enhanced Raman Spectroscopy (SERS) Chips Fabricated by All-Femtosecond-Laser-Processing for Real-Time Sensing of Toxic Substances10.1002/adfm.201706262 ↗
32. High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse10.1038/s41377-020-0311-2 ↗
33. Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser10.1364/PRJ.418937 ↗
34. Femtosecond laser-controlled self-assembly of amorphous-crystalline nanogratings in silicon10.1088/0957-4484/27/26/265602 ↗
35. Ultrafast Moving-Spot Microscopy: Birth and Growth of Laser-Induced Periodic Surface Structures10.1021/acsphotonics.6b00514 ↗
36. Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses10.1038/s41598-017-04891-3 ↗
37. Cylindrically Focused Nonablative Femtosecond Laser Processing of Long-Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency10.1002/adom.201900706 ↗
38. Large-area commercial-grating-quality subwavelength periodic ripples on silicon efficiently fabricated by gentle ablation with femtosecond laser interference via two cylindrical lenses10.1016/j.optlastec.2020.106441 ↗
39. Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser10.1021/nn900654v ↗
40. Optical Field Enhancement in Au Nanoparticle-Decorated Nanorod Arrays Prepared by Femtosecond Laser and Their Tunable Surface-Enhanced Raman Scattering Applications10.1021/acsami.7b13241 ↗
41. Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon10.1364/OE.21.029643 ↗
42. Etching-assisted femtosecond laser modification of hard materials10.29026/oea.2019.190021 ↗
43. All-Glass 3D Optofluidic Microchip with Built-in Tunable Microlens Fabricated by Femtosecond Laser-Assisted Etching10.1002/adom.201701299 ↗
44. Femtosecond laser-induced large area of periodic structures on chalcogenide glass via twice laser direct-writing scanning process10.1016/j.optlastec.2019.105977 ↗
45. Femtosecond laser-induced cross-periodic structures on a crystalline silicon surface under low pulse number irradiation10.1016/j.apsusc.2014.11.124 ↗
46. Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles10.1364/AO.32.002582 ↗
47. Light Reflection Loss Reduction by Nano-Structured Gratings for Highly Efficient Next-Generation GaAs Solar Cells10.3390/en13164198 ↗
48. Influence of microroughness on emissivity10.1063/1.1776634 ↗
49. Operator approach to electromagnetic coupled-wave calculations of lamellar gratings: infrared optical properties of intrinsic silicon gratings10.1364/AO.33.004807 ↗
50. Charge-transfer-induced surface-enhanced Raman scattering on Ag-TiO2 nanocomposites10.1021/jp903600r ↗
51. Revealing interfacial charge transfer in TiO2/reduced graphene oxide nanocomposite by surface-enhanced Raman scattering (SERS): Simultaneous a superior SERS-active substrate10.1016/j.apsusc.2019.05.122 ↗
52. Mesoscopic and Microscopic Strategies for Engineering Plasmon-Enhanced Raman Scattering10.1002/adom.201701097 ↗
53. Peter Nordlander, and Hongxing Xu, Polarization Dependence of Surface-Enhanced Raman Scattering in Gold Nanoparticle-Nanowire Systems10.1021/nl8015297 ↗
54. Black-Phosphorus-Based Orientation-Induced Diodes10.1002/adma.201704653 ↗
55. Self-organized ion-beam synthesis of nanowires with broadband plasmonic functionality10.1103/PhysRevB.81.165436 ↗