journal article·2020-07

Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells

Woo-Jae Lee, Eun-Young Yun, Han-Bo-Ram Lee, Suck Won Hong, Se-Hun Kwon

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Fuel Cells and Related Materials · Semiconductor materials and devices · Electrocatalysts for Energy Conversion

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (52)

Show source-provided references
1. High-performance solid acid fuel cells through humidity stabilization10.1126/science.1090920 ↗
2. An octane-fueled solid oxide fuel cell10.1126/science.1109213 ↗
3. Fuel cells: The next evolution10.1557/mrs2005.164 ↗
4. Polymer electrolyte membrane technology for fuel cells10.1557/mrs2005.165 ↗
5. Review of bipolar plates in PEM fuel cells: Flow-field designs10.1016/j.ijhydene.2004.09.019 ↗
6. Review and analysis of PEM fuel cell design and manufacturing10.1016/S0378-7753(02)00542-6 ↗
7. Effects of block length and membrane processing conditions on the morphology and properties of perfluorosulfonated poly(arylene ether sulfone) multiblock copolymer membranes for PEMFC10.1021/acsami.5b01835 ↗
8. Corrosion behavior of TiN-coated stainless steel as bipolar plate for proton exchange membrane fuel cell10.1016/j.ijhydene.2010.01.043 ↗
9. Materials for fuel-cell technologies10.1038/35104620 ↗
10. CrN/Cr multilayer coating on 316L stainless steel as bipolar plates for proton exchange membrane fuel cells10.1016/j.jpowsour.2011.09.091 ↗
11. U. S. Department of Energy Hydrogen, Multi-Year Research, Development and demonstration plan, technical plan: Fuel cells 3.4, 2012, pp. 1–49. http://www.eere.energy.gov/hydrogenandfuelcells/mypp/pdfs/fuel_cells.pdf (updated November 2014).
12. Metal bipolar plates for PEM fuel cell – a review10.1016/j.jpowsour.2006.09.088 ↗
13. Bipolar plate materials for PEMFCs: a conductivity and stability study10.1016/j.jpowsour.2008.01.038 ↗
14. U. S. DRIVE, Fuel cell technical team road map, 2013, pp. 1–26. http://energy.gov/sites/prod/files/2014/02/f8/fctt_roadmap_june2013.pdf.
15. Corrosion of metal bipolar plates for PEM fuel cells: A review10.1016/j.ijhydene.2010.01.059 ↗
16. Pre-oxidized and nitrided stainless steel alloy foil for proton exchange membrane fuel cell bipolar plates. Part 2: Single-cell fuel cell evaluation of stamped plates10.1016/j.jpowsour.2010.03.056 ↗
17. Corrosion of stainless steel coated with TiN, (TiAl) N and CrN in aqueous environments10.1016/S0010-938X(01)00102-0 ↗
18. Atomic layer deposition: An overview10.1021/cr900056b ↗
19. Al2O3/TiO2 nanolaminate thin film encapsulation for organic thin film transistors via plasma-enhanced atomic layer deposition, ACS Appl. Mater. Interfaces 6 (2014) 6731–6738. https://doi.org/10.1021/am500458d.10.1021/am500458d ↗
20. Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor10.1021/am5007222 ↗
21. Al2O3 and TiO2 atomic layer deposition on copper for water corrosion resistance10.1021/am2009579 ↗
22. Low-temperature plasma-assisted atomic layer deposition of silicon nitride moisture permeation barrier layers10.1021/acsami.5b06801 ↗
23. Surface chemistry in the atomic layer deposition of TiN films from TiCl4 and ammonia10.1021/jp062019f ↗
24. Batch ALD: Characteristics, comparison with single wafer ALD, and examples10.1016/j.surfcoat.2007.05.009 ↗
25. High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation10.1002/adma.201000766 ↗
26. Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition10.1016/j.surfcoat.2007.08.066 ↗
27. Chemical and electrochemical characterization of hybrid PVD + ALD hard coatings on tool steel10.1016/j.elecom.2009.08.052 ↗
28. Improvement in corrosion resistance of CrN coated stainless steel by conformal TiO2 deposition10.1016/j.surfcoat.2007.08.078 ↗
29. An investigation into TiN-coated 316L stainless steel as a bipolar plate material for PEM fuel cells10.1016/j.jpowsour.2006.12.034 ↗
30. Corrosion properties and contact resistance of TiN, TiAlN and CrN coatings in simulated proton exchange membrane fuel cell environments10.1016/j.jpowsour.2009.12.127 ↗
31. Use of 1, 1-dimethylhydrazine in the atomic layer deposition of transition metal nitride thin films10.1149/1.1393909 ↗
32. Low-temperature deposition of TiN by plasma-assisted atomic layer deposition10.1149/1.2344843 ↗
33. TiCl4 as a precursor in the TiN deposition by ALD and PEALD10.1149/1.1938108 ↗
34. Low temperature, low resistivity PEALD TiN using TDMAT under hydrogen reducing ambient10.1149/1.2940306 ↗
35. Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor10.1116/1.1624285 ↗
36. Dataset for TiN thin films prepared by plasma-enhanced atomic layer deposition using tetrakis(dimethylamino)titanium (TDMAT) and titanium tetrachloride (TiCl4) precursor10.1016/j.dib.2020.105777 ↗
37. Stainless steel as bipolar plate material for polymer electrolyte membrane fuel cells10.1016/S0378-7753(03)00023-5 ↗
38. Growth per cycle in atomic layer deposition: A theoretical model10.1002/cvde.200306265 ↗
39. Initial growth mechanism of atomic layer deposited TiN10.1063/1.1760217 ↗
40. Growth mechanism of TiN film on dielectric films and the effects on the work function10.1016/j.tsf.2004.11.239 ↗
41. Alteration of Cu conductivity in the size effect regime10.1116/1.1642639 ↗
42. Characteristics of TiN thin films grown by ALD using TiCl4 and NH310.1007/BF03179261 ↗
43. Atomic layer deposition of ruthenium thin films from an amidinate precursor10.1002/cvde.200906789 ↗
44. Metalorganic atomic layer deposition of TiN films using TDMAT and NH3
45. Tantalum nitride atomic layer deposition using (tert-Butylimido)tris(diethylamido)tantalum and hydrazine10.1149/1.2908741 ↗
46. The effect of some sulphur compounds on the pitting corrosion of type 304 stainless steel10.1016/S0254-0584(99)00206-0 ↗
47. Catalytic surface reactions during nucleation and growth of atomic layer deposition of noble metals: A case study for platinum10.1149/05810.0183ecst ↗
48. Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films10.1039/c2dt11837h ↗
49. Plasma-enhanced ALD of TiO2 thin films on SUS 304 stainless steel for photocatalytic application10.1149/1.3095515 ↗
50. Surface properties of Ti(N, C, O) thin coating layers deposited by PA-MOCVD for bipolar plates used PEMFC10.1007/s12540-011-0625-y ↗
51. Microstructure and defect characterization at interfaces in TiN/CrN multilayer coatings10.1016/S0257-8972(00)00527-2 ↗
52. Corrosion resistance and interfacial contact resistance of TiN coated 316L bipolar plates for proton exchange membrane fuel cell10.1016/j.ijhydene.2011.03.021 ↗