A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance
Source abstract
Abstract
A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Ion-surface interactions and analysis · Analytical chemistry methods development · Mass Spectrometry Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (42)
Show source-provided references
1. Surface analysis by secondary ion mass spectrometry (SIMS)10.1016/0039-6028(94)90658-0 ↗
2. Imaging with mass spectrometry10.1021/cr980137w ↗
3. Imaging mass spectrometry10.1002/mas.20124 ↗
4. SIMS imaging of the nanoworld: applications in science and technology10.1039/c2ja30015j ↗
5. Chemical-analysis of inorganic and organic-surfaces and thin-films by static time-of-flight secondary-ion mass-spectrometry (ToF-SIMS)10.1002/anie.199410231 ↗
6. Mechanism of the SIMS matrix effect10.1063/1.90546 ↗
7. Quantitative imaging ion microscopy: a short review
8. Hydrogen isotope heterogeneities in the mantle from ion probe analysis of amphiboles from ultramafic rocks10.1016/0012-821X(91)90191-J ↗
9. Oxygen isotopes in refractory stratospheric dust particles – proof of extraterrestrial origin10.1126/science.237.4821.1468 ↗
10. SIMS analysis of oxygen isotopes: matrix effects in complex minerals and glasses10.1016/S0009-2541(97)00015-6 ↗
11. Correction of dead-time effects in time-of-flight mass-spectrometry10.1116/1.579255 ↗
12. Mitigating dead-time effects during multivariate analysis of ToF-SIMS spectral images10.1002/sia.2763 ↗
13. A novel ToF-SIMS operation mode for improved accuracy and lateral resolution of oxygen isotope measurements on oxides10.1039/c3ja50059d ↗
14. Oxygen transport in electroceramics investigated by electrochemical 18O/16O isotope exchange and ToF-SIMS10.1002/sia.5134 ↗
15. The isotope exchange depth profiling (IEDP) technique using SIMS and LEIS10.1007/s10008-010-1289-0 ↗
16. On the accurate measurement of oxygen self-diffusivities and surface exchange coefficients in oxides via SIMS depth profiling10.1016/S0167-2738(01)00893-1 ↗
17. Visualization of oxygen reduction sites at Pt electrodes on YSZ by means of O-18 tracer incorporation: the width of the electrochemically active zone10.1039/c0cp00309c ↗
18. Determination of proton and oxygen movements in solid oxides by the tracer gases exchange technique and secondary ion mass spectrometry10.1016/S0169-4332(02)00781-X ↗
19. A SIMS study of oxygen tracer diffusion and surface exchange in La0.8Sr0.2MnO3+delta10.1016/S0167-577X(99)00228-1 ↗
20. Tensile lattice distortion does not affect oxygen transport in yttria-stabilized zirconia–CeO2 heterointerfaces10.1021/nn302812m ↗
21. Topography and field effects in the quantitative analysis of conductive surfaces using ToF-SIMS10.1016/j.apsusc.2008.05.164 ↗
22. High precision SIMS oxygen isotope analysis and the effect of sample topography10.1016/j.chemgeo.2009.02.012 ↗
23. Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung10.1007/BF02956173 ↗
24. I. 22493: 2008, Microbeam Analysis – Scanning Electron Microscopy – Vocabulary.
25. Imaging surface analysis: lateral resolution and its relation to contrast and noise10.1039/c004323k ↗
26. Surface investigation of solids by statistical method of secondary ion mass spectroscopy (SIMS)10.1016/0039-6028(73)90232-X ↗
27. Vickerman · 2001
28. Ultra high spatial resolution SIMS with cluster ions – approaching the physical limits10.1002/sia.5093 ↗
29. Oxygen reduction sites and diffusion paths at La0.9Sr0.1MnO3−x/yttria-stabilized zirconia interface for different cathodic overvoltages by secondary-ion mass spectrometry10.1016/S0167-2738(99)00276-3 ↗
30. A novel technique for imaging electrochemical reaction sites on a solid oxide electrolyte10.1016/S0167-2738(00)00634-2 ↗
31. Visualization of oxygen transport behavior at metal electrode/oxide electrolyte interface using secondary ion mass spectrometry10.1016/j.ssi.2008.02.029 ↗
32. Oxygen transport at the LaMnO3 film/yttria-stabilized zirconia interface under different cathodic overpotentials by secondary ion mass spectrometry10.1149/1.1359205 ↗
33. Imaging of oxygen transport at SOFC cathode/electrolyte interfaces by a novel technique10.1016/S0378-7753(01)01017-5 ↗
34. Investigation of the oxygen exchange mechanism on Pt vertical bar yttria stabilized zirconia at intermediate temperatures: surface path versus bulk path10.1016/j.electacta.2011.07.112 ↗
35. Current–voltage characteristics of platinum model electrodes on yttria-stabilized zirconia10.1149/2.044205jes ↗
36. Monitoring active and resistive zones of SOFC cathodes by voltage driven tracer incorporation10.1149/1.3570216 ↗
37. Metallic electromigration phenomena10.1109/33.2957 ↗
38. Oxygen exchange and diffusion measurements: the importance of extracting the correct initial and boundary conditions10.1016/j.ssi.2005.05.010 ↗
39. Determining oxygen isotope profiles in oxides with time-of-flight SIMS10.1016/j.ssi.2005.03.012 ↗
40. Isotopic ratio measurements by time-of-flight secondary ion mass spectrometry10.1016/S1387-3806(01)00435-3 ↗
41. Linearity of the instrumental intensity scale in TOF-SIMS – a VAMAS interlaboratory study10.1002/sia.3761 ↗
42. The kinetics of oxygen transport in 9.5mol % single crystal yttria stabilised zirconia10.1016/S0167-2738(97)00345-7 ↗