Performance Evaluation Methodology for Patterned Micro-Heaters Used in Gas Sensor Applications

Hazardous gas detection requires portable, low-power sensors with high sensitivity, where micro-heater design is critical for semiconductor metal oxide (SMO) sensors. This study presents a standardized evaluation framework for quantitatively comparing patterned micro-heaters under equal-power conditions, ensuring objective comparison across geometries. Two key metrics—power efficiency and temperature uniformity—were defined, normalized, and integrated into a single optimal score through weighted summation. The framework was validated through coupled electro-thermal simulations and experiments on six geometries, including spiral and meander patterns. Results demonstrated that the framework enables accurate identification of designs combining low power consumption with high temperature uniformity. Notably, the meander-based design showed superior efficiency and uniformity, demonstrating its suitability for practical applications. This framework thus offers a rational tool for micro-heater design, supporting the development of reliable, energy-efficient devices for portable and Internet of Things (IoT) applications.