journal article·2021-03-15Open access

In-Situ Photo-Dissociation and Polymerization of Carbon Disulfide with Vacuum Ultraviolet Microplasma Flat Lamp for Organic Thin Films

Jinhong Kim, Sung-Jin Park

Applied Sciences· Volume 11· Issue 6

Abstract

Vacuum UV (VUV) photo-dissociation for a liquid phase organic compound, carbon disulfide (CS2), has been investigated. 172 nm (7.2 eV) VUV photons from Xe2* excimers in a microcavity plasma lamp irradiated free-standing liquid droplets on Si substrate in each a nitrogen environment and an atmospheric air environment. Selective and rapid dissociation of CS2 into C-C, C-S or C-O-S based fragments was observed in the different gas environments during the reaction. Thin-layered polymeric microdeposites have been identified by characterization with a Scanning electron microscope (SEM), Energy dispersive x-ray spectroscopy (EDX), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). This novel photo-process from the flat VUV microplasma lamp introduces another pathway of low-temperature organic (or synthetic) conversion for large area deposition. The in-situ, selective conversion of various organic precursors can be potentially used in optoelectronics and nanotechnology applications.
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Research context

OpenAlex topics: Catalytic Processes in Materials Science · Surface Modification and Superhydrophobicity · Gas Sensing Nanomaterials and Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Laboratory of Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA

Eden Park Illumination, Inc., Champaign, IL 61821, USA

References (34)

Show source-provided references
1. Exploration of Plasma-Enhanced Chemical Vapor Deposition as a Method for Thin-Film Fabrication with Biological Applications10.1021/am302989x ↗
2. Laser chemical vapour deposition: Materials, modelling, and process control10.1179/095066001771048727 ↗
3. Performance and reliability of low-temperature polysilicon TFT with a novel stack gate dielectric and stack optimization using PECVD nitrous oxide plasma10.1109/TED.2003.820791 ↗
4. Detecting and Preventing Gate Oxide Plasma Damage During PECVD Carbon Deposition Through Surface Photovoltage Measurements10.1109/TSM.2017.2757909 ↗
5. Ajuria, S.A., and Hossain, T.Z. (1998). Plasma damage monitoring for PECVD deposition: A contact potential difference study and device yield analysis. Proceedings of SPIE, SPIE.
6. 25 W of average power at 172 nm in the vacuum ultraviolet from flat, efficient lamps driven by interlaced arrays of microcavity plasmas10.1063/1.4976530 ↗
7. Carbon dioxide and carbon disulfide as resources for functional polymers10.1016/j.progpolymsci.2005.01.005 ↗
8. Large-Scale Laser Fabrication of Antifouling Silicon-Surface Nanosheet Arrays via Nanoplasmonic Ablative Self-Organization in Liquid CS2 Tracked by a Sulfur Dopant10.1021/acsanm.8b00392 ↗
9. Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide10.1116/1.4780122 ↗
10. Photopolymerization of Carbon Disulfide Yields the High-Pressure-Phase (CS2)x10.1021/ja00150a026 ↗
11. Formation of CmSn compounds by photopolymerization of CS2 in the atmosphere of Jupiter10.1111/j.1945-5100.2000.tb01781.x ↗
12. Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in Ar/CS2 Flows10.1109/TPS.2008.926955 ↗
13. Real-time detection of S(1D2) photofragments produced from the 1B2(1Σu+) state of CS2 by vacuum ultraviolet photoelectron imaging using 133 nm probe pulses10.1063/1.4982219 ↗
14. Reaction of ozone with carbon disulfide10.1021/j100718a003 ↗
15. Conversion of carbon disulfide in air by non-thermal plasma10.1016/j.jhazmat.2013.07.043 ↗
16. Raman and Infrared Spectra of Crystalline Carbon Disulfide10.1063/1.1696065 ↗
17. Raman scattering of carbon disulfide: The temperature effect10.1119/1.3226562 ↗
18. Micro-Raman and Tip-Enhanced Raman Spectroscopy of Carbon Allotropes10.1002/masy.200850501 ↗
19. Line shape analysis of the Raman spectra from pure and mixed biofuels esters compounds10.1016/j.fuel.2013.06.038 ↗
20. Infrared and Raman spectra of lignin substructures: Coniferyl alcohol, abietin, and coniferyl aldehyde10.1002/jrs.5588 ↗
21. Raman Spectral Analysis in the C−H Stretching Region of Proteins and Amino Acids for Investigation of Hydrophobic Interactions10.1021/jf981074l ↗
22. Raman scattering analysis of silicon dioxide single crystal treated by direct current plasma discharge10.1063/1.3543838 ↗
23. Green synthesis of highly stabilized nanocrystalline silver particles by a non-pathogenic and agriculturally important fungus T. asperellum10.1088/0957-4484/19/7/075103 ↗
24. Spizzirri, P., Fang, J., Rubanov, S., Gauja, E., and Prawer, S. (2010). Nano-Raman spectroscopy of silicon surfaces. arXiv.
25. Cross section for the Raman effect in molecular nitrogen gas10.1364/JOSA.63.001604 ↗
26. Odhner, J.H., Romanov, D.A., and Levis, R.J. (2010, January 17). Filament-based stimulated Raman spectroscopy. Proceedings of the SPIE LASE, San Francisco, CA, USA.10.1117/12.842129 ↗
27. Understanding the Role of Nitrogen in Plasma-Assisted Surface Modification of Magnetic Recording Media with and without Ultrathin Carbon Overcoats10.1038/srep07772 ↗
28. Carbon Overcoat Oxidation in Heat-Assisted Magnetic Recording10.1109/TMAG.2012.2236645 ↗
29. Probing the role of C+ ion energy, thickness and graded structure on the functional and microstructural characteristics of ultrathin carbon films (<2 nm)10.1016/j.triboint.2014.08.001 ↗
30. Hair fiber as a precursor for synthesizing of sulfur- and nitrogen-co-doped carbon dots with tunable luminescence properties10.1016/j.carbon.2013.07.095 ↗
31. Sulfur/carbon nanocomposite-filled polyacrylonitrile nanofibers as a long life and high capacity cathode for lithium–sulfur batteries10.1039/C4TA06976E ↗
32. Stabilizing high sulfur loading Li–S batteries by chemisorption of polysulfide on three-dimensional current collector10.1016/j.nanoen.2016.10.049 ↗
33. Performance of XPS analysis of model biochemical compounds10.1051/jcp/1995921043 ↗
34. Carbon Disulfide (CS2) Mechanisms in Formation of Atmospheric Carbon Dioxide (CO2) Formation from Unconventional Shale Gas Extraction and Processing Operations and Global Climate Change10.4137/EHI.S15667 ↗