Electrical Coupling of Monolithic 3D Inverters (M3INVs): MOSFET and Junctionless FET
Source abstract
Abstract
In this paper, we investigated the electrical coupling between the top and bottom transistors in a monolithic 3-dimensional (3D) inverter (M3INV) stacked vertically with junctionless field-effect transistor (JLFET), which is one of candidates to replace metal-oxide-semiconductor field-effect transistors (MOSFET). Currents, transconductances, and gate capacitances of the top N-type transistor at the different gate voltages of the bottom P-type transistor as a function of thickness of inter-layer dielectric (TILD) and gate channel length (Lg) are simulated using technology computer-aided-design (TCAD). In M3INV stacked vertically with MOSFET (M3INV-MOS) and JLFET (M3INV-JL), the variations of threshold voltage, transconductance, and capacitance increase as TILD decreases and they increase as Lg increases, and thus there is a strong coupling in M3INV at the range of TILD ≤ 30 nm. In M3INV, the coupling between stacked JLFETs in M3INV-JL is larger than that between MOSFETs in M3INV-MOS at the same TILD and Lg. The switching threshold voltage (Vm) and noise margins (NMs) of M3INV are calculated from the voltage transfer characteristics (VTC) simulated with TCAD mixed-mode. As the gate lengths of M3INV-MOS and M3INV-JL increase, the Vm variations increase and decrease, respectively. The smaller the gate lengths of M3INV-NOS and M3INV-JL, the larger and smaller the variation of Vm, respectively. The noise margin of M3INV-MOS is larger and better for inverter characteristics than one of M3INV-JL. M3INV-MOS has less electrical coupling than M3INV-JL.
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Research context
OpenAlex topics: Advancements in Semiconductor Devices and Circuit Design · Semiconductor materials and devices · 3D IC and TSV technologies
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Affiliations
Department of Electrical, Electronic and Control Engineering and IITC, Hankyong National University, Anseong 17579, Korea
Group for Smart Energy Nano Convergence, Korea Institute of Industrial Technology, Gwangju 61012, Korea
Funding
National Research Foundation of Korea
References (22)
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