JFET Integration Using a Foundry SOI Photonics Platform
Source abstract
Abstract
We explore the monolithic integration of conventional electronics with SOI photonics using the commercial silicon photonics foundry technology offered by A*STAR’s Institute of Microelectronics (IME). This process offers optical waveguide modulators and photodetectors, but was not intended to support transistors. We present the implementation of junction field effect transistors (JFETs) integrated with optical waveguides and photodetectors. A simple SPICE model is developed for the JFETs based on the available ion implant parameters, and the geometry feature size allowed by the technology’s layout rules. We have demonstrated the monolithic integration of photonics and electronics circuits. This work could be useful for application in waveguide sensors and optical telecommunications.
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Research context
OpenAlex topics: Photonic and Optical Devices · Optical Network Technologies · Neural Networks and Reservoir Computing
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Affiliations
Department of Electronics, Carleton University, Ottawa, ON K1S 5B6, Canada
Funding
Natural Sciences and Engineering Research Council of Canada · Canada Research Chairs
References (13)
Show source-provided references
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