Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies
Source abstract
Abstract
Abstract— We have studied the effect of Al2O3 nanofiber on the properties of fused silica ceramics such as are used to produce containers for molten semiconductor materials. The addition of 0.05 to 0.15 wt % alumina nanofiber has been shown to cause an increase in the mechanical strength of ceramics prepared via slip casting. The addition of 0.15 wt % nanofiber increased the compressive strength of the ceramic material obtained at a sintering temperature of 1200°C from 90 ± 4 to 143 ± 9 MPa and its bending strength from 28 ± 2 to 42 ± 3 MPa.
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Research context
OpenAlex topics: Advanced ceramic materials synthesis · Silicone and Siloxane Chemistry · Aluminum Alloys Composites Properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (16)
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1. Pivinskii, Yu.E. and Suzdal’tsev, E.I., Kvartsevaya keramika i ogneupory (Quartz Ceramics and Refractories), vol. 1: Teoreticheskie osnovy i tekhnologicheskie protsessy (Theoretical Foundations and Technology), Moscow: Teploenergetik, 2008.
2. Pivinskii, Yu.E. and Suzdal’tsev, E.I., Kvartsevaya keramika i ogneupory (Quartz Ceramics and Refractories), vol. 2: Materialy, ikh svoistva i oblasti primeneniya (Materials, Their Properties, and Their Application Areas), Moscow: Teploenergetik, 2008.
3. Optical Grade Germanium. https://www.findlight.net/optics/optical-materials/optical-glass/optical-grade-germanium.
4. Einhaus, R., Lissalde, F.C., and Rivat, P., US Patent 7442255, 2008.
5. Shimanskii, A.F., Podshchibyakina, E.Yu., Samoilo, A.S., Zhizhaev, A.M., Gorodishcheva, A.N., and Vasil’eva, M.N., Silica crucibles for molten germanium with a boron nitride-containing composite inner layer, Inorg. Mater., 2021, vol. 57, no. 2, p. 208–212. https://doi.org/10.1134/S002016852102011410.1134/S0020168521020114 ↗
6. Shimanskii, A.F., Pivinskii, Yu.E., Savchenko, N.S., and Podkopaev, O.I., RF Patent 2333900, Byull. Izobret., 2008, no. 26.
7. Liang, J.J., Lin, Q.H., Zhang, X., Jin, T., Zhou, Y.Z., Sun, X.F., Choi, B.G., Kim, I.S., Do, J.H., and Jo, C.Y., Effects of alumina on cristobalite crystallization and properties of silica-based ceramic cores, J. Mater. Sci. Technol., 2017, vol. 33, pp. 204–209. https://doi.org/10.1016/j.jmst.2016.02.01210.1016/j.jmst.2016.02.012 ↗
8. Khomenko, E.S., Zaichuk, A.V., Karasik, E.V., and Kunitsa, A.A., Quartz ceramics modified by nanodispersed silica additive, Funct. Mater., 2018, vol. 25, no. 3, pp. 613–618. https://doi.org/10.15407/fm25.03.61310.15407/fm25.03.613 ↗
9. Gu, Y., Bu, J., Ma, Ch., Zhao, D., and Wang, Z., Influence of nano-Yb2O3, nano-Nd2O3 and nano-Dy2O3 on sintering and crystallization of fused quartz ceramic materials, Adv. Mater. Res., 2013, vols. 750–752, pp. 517–520. https://doi.org/10.4028/www.scientific.net/AMR.750-752.51710.4028/www.scientific.net/AMR.750-752.517 ↗
10. Borodai, F.Ya., Vikulin, V.V., Itkin, S.M., Lyashenko, L.P., Shkarupa, I.L., and Samsonov, V.I., RF Patent 2458022, Byull. Izobret., 2012, no. 22.
11. Pivinskii, Yu.E. and Timoshenko, K.V., Rheotechnological properties of mixed suspensions in the SiO2–Al2O3 system and some properties of materials based on them: 1. Molten quartz–alumina system, Refract. Ind. Ceram., 2000, vol. 41, nos. 7–8, pp. 228–233. https://doi.org/10.1007/BF0269375410.1007/BF02693754 ↗
12. Zhu, X., Hayashi, H., Zhou, Y., and Hirao, K., Influence of additive composition on thermal and mechanical properties of β-Si3N4 ceramics, J. Mater. Res., 2004, vol. 19, no. 11, pp. 3270–3278. https://doi.org/10.1557/JMR.2004.041610.1557/JMR.2004.0416 ↗
13. Suzdal’tsev, E.I. and Kharitonov, D.V., The state and prospects of molding based on aqueous slip of inorganic materials, Refract. Ind. Ceram., 2002, vol. 43, nos. 11–12, pp. 367–370. https://doi.org/10.1023/A:102349291103910.1023/A:1023492911039 ↗
14. Minakov, A.V., Pryazhnikov, M.I., Simunin, M.M., Dobrosmyslov, S.S., Kuular, A.A., Molokeev, M.S., Volochaev, M.N., Khartov, S.V., and Voronin, A.S., Rheological properties of colloidal suspensions of alumina nanofibers, J. Mol. Liq., 2022, vol. 367, part A, p. 120385. https://doi.org/10.1016/j.molliq.2022.12038510.1016/j.molliq.2022.120385 ↗
15. Onsager, L., The effects of shape on the interaction of colloidal particles, Ann. N. Y. Acad. Sci., 1949, vol. 51, pp. 627–659. https://doi.org/10.1111/j.1749-6632.1949.tb27296.x10.1111/j.1749-6632.1949.tb27296.x ↗
16. Markovska, I., Yovkova, F., Minov, G., Rusev, D., and Lyubchev, L., Investigation of silane modified ceramic surface of porous mullite ceramics, Int. J. Environ. Ecol. Eng., 2013, vol. 7, no. 7, pp. 409–413.