A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications
Source abstract
Abstract
Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.
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Research context
OpenAlex topics: Photonic and Optical Devices · Advanced Fiber Laser Technologies · Advanced Photonic Communication Systems
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Université Grenoble Alpes, CEA, LETI, F38000 Grenoble, France
Institut des Nanotechnologies de Lyon, UMR CNRS 5270, Ecole Centrale Lyon, F-69130 Ecully, France
2DTU Fotonik, Technical University of Denmark, Kgs. DK-2800 Lyngby, Denmark
Funding
Horizon 2020 Framework Programme · Danish Research Council SPOC · H2020 European Research Council · French Direction Générale des Entreprises (DGE)
References (51)
Show source-provided references
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