Crystallinity and electrical properties of (Pb,Sr)TiO3 films enhanced by laser-assisted low-thermal-budget annealing
Source abstract
Abstract
The physical and electrical properties of (Pb,Sr)TiO3 (PSrT) films annealed by various techniques are systematically investigated in this study. The crystallinity and ferroelectricity of PSrT films can be enhanced by excimer laser annealing (ELA), but the effect only works on the upper region of films. On the other hand, PSrT films treated by rapid thermal annealing (RTA) can also improve crystallinity and ferroelectricity. However, the leakage current of films is seriously increased due to defects and interfacial diffusion induced by post-RTA at high temperature. As a result, the laser-assisted two-step annealing (post-ELA+RTA) is proposed in this work. It is found that PSrT films treated by post-ELA+RTA show improved crystallinity, better ferroelectric properties, higher dielectric constant, and lower leakage currents, which bring out the longer lifetime and higher breakdown field.
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Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Acoustic Wave Resonator Technologies · Dielectric materials and actuators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
Show source-provided references
1. D.H. Kang, J.H. Kim, J.H. Park, K.H. Yoon, Mater. Res. Bull. 36, 265 (2001)10.1016/S0025-5408(01)00511-6 ↗
2. F. Zhang, T. Karaki, M. Adachi, Japan. J. Appl. Phys. 44, 6995 (2005)10.1143/JJAP.44.6995 ↗
3. T. Karaki, M. Adachi, Japan. J. Appl. Phys. 44, 692 (2005)10.1143/JJAP.44.692 ↗
4. C.C. Chou, C.S. Hou, G.C. Chang, H.F. Cheng, Appl. Surf. Sci. 142, 413 (1999)10.1016/S0169-4332(98)00679-5 ↗
5. C.C. Chou, C.S. Hou, H.F. Cheng, Ferroelectrics 206–207, 393 (1998)10.1080/00150199808009172 ↗
6. C.S. Hou, H.C. Pan, C.C. Chou, H.F. Cheng, Ferroelectrics 232, 129 (1999)10.1080/00150199908015782 ↗
7. D. Roy, S.B. Krupanidhi, J. Mater. Res. 7, 2521 (1992)10.1557/JMR.1992.2521 ↗
8. C.P. De Araujo, J.F. Scott, G.W. Taylor, Ferroelectric Thin Films, Synthesis and Basic Properties, Ferroelectric and Related Phenomena (Gordon and Breach Publishers, New York, 1996), vol. 10, pp. 193–226 and pp. 447–478
9. D.G. Lim, Y. Park, S.I. Moon, J. Yi, Applications of Ferroelectrics 2000, ISAF 2000, Proc. 2000 12th IEEE Int. Symposium, Honolulu, 599 (2000)
10. W. Huang, S.W. Jiang, Y.R. Li, J. Zhu, Y. Zhang, X.H. Wei, H.Z. Zeng, Thin Solid Films 500, 138 (2006)10.1016/j.tsf.2005.11.062 ↗
11. S. Kuchipudi, H.C. Lee, J.H. Hunag, I.N. Lin, Ferroelectrics 328, 33 (2005)10.1080/00150190500310898 ↗
12. H.C. Cheng, C.C. Tsai, J.H. Lu, H.H. Chen, B.T. Chen, T.K. Chang, C.W. Lin, J. Electrochem. Soc. 154, J5 (2007)10.1149/1.2382420 ↗
13. A. Marmorstein, A.T. Voutsas, R. Solanki, J. Appl. Phys. 82, 4303 (1997)10.1063/1.366238 ↗
14. Y. Zhu, J. Zhu, Y.J. Song, S.B. Desu, Appl. Phys. Lett. 73, 1958 (1998)10.1063/1.122334 ↗
15. C.F. Chou, H.C. Pan, C.C. Chou, Japan. J. Appl. Phys. 41, 6679 (2002)10.1143/JJAP.41.6679 ↗
16. D.C. Shye, B.S. Chiou, C.C. Hwang, C.C. Jaing, H.W. Hsu, J.S. Chen, H.C. Cheng, Japan. J. Appl. Phys. 42, 1680 (2003)10.1143/JJAP.42.1680 ↗
17. D.B. Chrisey, G.K. Huber, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994), pp. 55–87 and pp. 167–198
18. B.H. Park, S.J. Hyun, C.R. Moon, B.D. Choe, J. Lee, C.Y. Kim, W. Jo, T.W. Noh, J. Appl. Phys. 84, 4428 (1998)10.1063/1.368666 ↗
19. R. Waster, R.T. Baiatu, K.H. Haratl, J. Am. Ceram. Soc. 73, 1645 (1990)10.1111/j.1151-2916.1990.tb09809.x ↗
20. M.S. Tsai, T.Y. Tseng, IEEE Trans. Comp. Packag. Technol. 23, 128 (2000)10.1109/6144.833051 ↗
21. J.L. Wang, Y.S. Lai, B.S. Chiou, H.Y. Tseng, C.C. Tsai, C.P. Juan, C.K. Jan, H.C. Cheng, J. Phys.: Condens. Matter 18, 10457 (2006)