Structural and electrical properties of polycrystalline PbZr 0.5 Ti 0.5 O 3 films deposited on La 0.5 Sr 0.5 CoO 3 coated silicon by sol-gel process

La0.5Sr0.5CoO3 (LSCO) films have been grown on Si (100) by a metalorganic chemical liquid deposition (MOCLD) technique using lanthanum acetate, strontium acetate and cobalt acetate as the starting materials. Subsequent PbZr0.5Ti0.5O3 (PZT) films were deposited onto LSCO films by a modified sol-gel method. Field-emission scanning electron microscopy and X-ray diffraction analysis show that PZT and LSCO films are polycrystalline and entirely perovskite phase. At an applied electric field of 250 kV/cm, the Pt/PZT/LSCO capacitor shows no polarization fatigue after 3×109 switching cycles and an internal electric field; the remnant polarization Pr and the coercive field Ec are about 22 μC/cm2 and 73 kV/cm, respectively. The dielectric constant of PZT films is 650 at a frequency of 1 kHz.