Electronic mechanism of ion expulsion under UV nanosecond laser excitation of silicon: Experiment and modeling
Source abstract
Abstract
We present experimental and modeling studies of UV nanosecond pulsed laser desorption and ablation of (111) bulk silicon. The results involve a new approach to the analysis of plume formation dynamics under high-energy photon irradiation of the semiconductor surface. Non-thermal, photo-induced desorption has been observed at low laser fluence, well below the melting threshold. Under ablation conditions, the non-thermal ions have also a high concentration. The origin of these ions is discussed on the basis of electronic excitation of Si surface states associated with the Coulomb explosion mechanism. We present a model describing dynamics of silicon target excitation, heating and harge-carrier transport.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (17)
Show source-provided references
1. A. Miotello, R. Kelly: Appl. Phys. A 69, 67 (1999)10.1007/s003399900296 ↗
2. R. Kelly, A. Miotello: Nucl. Instrum. Methods Phys. Res., Sect. B 122, 374 (1997)10.1016/S0168-583X(96)00765-3 ↗
3. J.T. Dickinson, S.C. Langford, J-J. Shin, D.L. Doering: Phys.Rev. Lett. 73, 2630 (1994)10.1103/PhysRevLett.73.2630 ↗
4. J. Kanasaki, K. Tanimura: Phys. Rev. B 66, 125320 (2002)10.1103/PhysRevB.66.125320 ↗
5. R. Stoian, A. Rosenfeld, D. Ashkenasi, I.V. Hertel, N.M. Bulgakova, E.E.B. Campbell: Phys. Rev. Lett. 88, 0976031 (2002)10.1103/PhysRevLett.88.097603 ↗
6. M. Henik, F. Costache, J. Reif: Appl. Surf. Sci. 186, 381 (2002)10.1016/S0169-4332(01)00688-2 ↗
7. G.S. Higashi, Y.J. Chabal, G.W. Trucks, K. Raghavachari: Appl. Phys. Lett. 56, 656 (1990)10.1063/1.102728 ↗
8. G.E. Jellison, D.H. Lowndes, D.N. Mashburn, R.F. Wood: Phys. Rev. B 34, 2407 (1986)10.1103/PhysRevB.34.2407 ↗
9. S. De Unamuno, E. Fogarassy: Appl. Surf. Sci. 36, 1 (1989)10.1016/0169-4332(89)90894-5 ↗
10. L. Chen, V. Liberman, J.A. O’Neil, Z. Wu, R.M. Osgood Jr.: J. Vac. Sci. Technol. A 6, 1426 (1988)10.1116/1.575719 ↗
11. A.V. Bulgakov, W. Marine, O.F. Bobrenok, I. Ozerov: unpublished
12. F. Stietz, M. Stuke, J. Viereck, T. Wenzel, F. Träger: Appl. Surf. Sci, 129, 64 (1998)10.1016/S0169-4332(97)00611-9 ↗
13. Full set and more extended analysis of the TOF spectra will be given in a separate paper
14. W. Marine, M. Gerry, P. Thomsen-Schmidt, J.M. Scotti d’Aniello: Appl. Surf. Sci. 69, 290 (1993)10.1016/0169-4332(93)90521-C ↗
15. H.M. van Driel: Phys. Rev. B 35, 8166 (1987)10.1103/PhysRevB.35.8166 ↗
16. V.N. Tokarev, J.G. Lunney, W. Marine, M. Sentis: J. Appl. Phys. 78, 1241 (1995)10.1063/1.360365 ↗
17. A.V. Bulgakov, N.M. Bulgakova: Quantum Electron. 29, 433 (1999)10.1070/QE1999v029n05ABEH001503 ↗